f-ca-lu doped aluminum nitride composite ceramic green body and its preparation process

Abstract

The invention relates to a F-Ca-Lu-doped aluminum nitride composite ceramic green body with high thermal conductivity and a casting process thereof. The ceramic green body is prepared by a casting process, and organic solvents, binders, nitriding Aluminum powder, sintering aid, dispersant, anti-sedimentation agent, plasticizer and other raw materials are uniformly dispersed and stirred, and sand-milled to obtain casting slurry, and the slurry is subjected to vacuum defoaming, casting plate making, isostatic pressing and other processes The multi-phase ceramic green body with high flatness and small sintering shrinkage can be obtained through advanced processing, and at the same time meet the industrial needs of rapid, large-scale, and stable quality manufacturing of green bodies; the obtained aluminum nitride ceramic substrate is widely used in the field of integrated circuits, high-power devices and Optoelectronic engineering fields such as high-power LED lighting have broad application prospects.

Description

technical field

[0001] The invention relates to the field of aluminum nitride composite ceramics with high thermal conductivity, in particular to an F-Ca-Lu doped aluminum nitride composite ceramic green body with high thermal conductivity and a casting process thereof. Background technique

[0002] Aluminum nitride (AlN) ceramic substrate has excellent characteristics such as high thermal conductivity, high hardness, good electrical insulation, low dielectric constant and dielectric loss, thermal expansion coefficient matching with silicon, and non-toxicity. It is used in power electronics, electronic information and other fields have a wide range of application potential.

[0003] At present, the synthesis processes of aluminum nitride powder that have become commercialized mainly include the direct nitriding method of aluminum powder and the carbon thermal reduction method of alumina. However, aluminum nitride is a covalent bond crystal, which is difficult to sinter, and...