Method for preparing optical waveguide micro-lens array and detecting optical performance

Abstract

The invention relates to a method for preparing an optical waveguide micro-lens array and detecting optical performance, the method comprises the following steps: preparing a photoresist micro-lens array, mixing polydimethylsiloxane and a curing agent, pouring the mixed polydimethylsiloxane and curing agent into the photoresist micro-lens array, and curing and stripping to obtain a concave lens array reverse mold; covering the surface of a heated SU-8 with the concave lens array reverse mold, quickly imprinting, cooling and stripping to obtain an SU-8 micro-lens array; directly irradiating theSU-8 micro-lens array by using ultraviolet light to prepare an optical waveguide micro-lens array; then, in a fluorescence observation state, selecting a fluorescent dye in a laser confocal microscope, setting a scanning depth and a scanning step length to obtain a light path transmission three-dimensional fluorescence image of the optical waveguide micro-lens array, and judging whether an optical waveguide structure is induced in the SU-8 micro-lens array or not by analyzing the distribution area of focusing light spots; and finaly, performing the evaluation of optical performance of the optical waveguide micro-lens array. According to the invention, the preparation of the optical waveguide micro-lens array is realized, and the optical performance of the optical waveguide micro-lens array is detected and evaluated.

Description

technical field [0001] The invention relates to the technical field of micro-nano manufacturing, in particular to a method for preparing an optical waveguide micro-lens array and detecting optical properties. Background technique [0002] In order to realize the transmission and change of optical information, the micro-optical imaging system was born. With the development of optical information processing and optical computing technology, the micro-optical imaging system is developing in the direction of simplicity, miniaturization, and compactness. A wide field of view ( FOV), high resolution, and high motion sensitivity. Microlens arrays have the advantages of light weight, small size, compact structure, and excellent optical performance. They are used in other micro-optical imaging systems such as fiber coupling, light intensity modulation, solar cells, artificial compound eyes, and biological observation. The included angle is smaller than the overall field of view, and...

AI Technical Summary

Problems solved by technology

Some people have prepared crystal cone structures in different material combinations, but this combined structure increases the processing difficulty of crystal cones; some people have prepared integrated polymer cones in curved compound eyes by using air pressure assisted technology and soft lithography technology. structure, which realized the preparation of artificial compound eyes with microlenses, polymer cones and waveguides aligned. This integrated structure also avoided the coupling error caused by the combined structure, but they only focused on the effect of process parameters on the length of the polymer cone. Insufficient research on the effect of polymer cones on the optical performance of bionic compound eyes, and no in-depth analysis on the improvement of optical crosstalk

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