Wide-range flexible resistance type pressure sensor and preparation method thereof

Abstract

The invention provides a wide-range flexible resistance type pressure sensor and a preparation method thereof, the sensor is of a multi-layer structure, the sensor comprises a lower packaging layer, a flexible substrate layer, a first conductive electrode, a composite sponge layer, a second conductive electrode and an upper packaging layer from bottom to top in sequence, and the inner side of the second conductive electrode is subjected to helium plasma irradiation etching to obtain a nanometer fluff structure. The composite sponge layer is obtained by compounding a sponge material and a conductive material through a solution impregnation method, and the conductive material with a lamellar structure is arranged in the composite sponge layer; and according to the invention, the pressure test sensitivity is improved through full contact of the electrode nano fluff structure and the hole structure, the sponge flexible skeleton is combined with the conductive material, the deformation of the sponge and the deformation of the conductive material are fully utilized, pressure sensitive mechanism switching is realized in different pressure ranges, the pressure detection range is expanded, and good linear response is kept in a wide range. The sensor provided by the invention has the advantages of simple structure manufacturing, small volume, light weight and biological harmlessness.

Description

technical field

[0001] The invention relates to the fields of energy conversion technology, surface treatment technology, micro-electro-mechanical system (MEMS), and two-dimensional pressure-sensitive materials, in particular to a wide-range flexible resistive pressure sensor and a preparation method. Background technique

[0002] Among the common physical quantities measured by sensors, pressure is one of the important parameters, and it exists in the aspects of cargo weighing identification, building structure stability monitoring, pipeline pressure monitoring, road traffic detection, pulse blood pressure monitoring, electronic skin touch and pressure sense, etc. Extensive measurement needs. With the improvement of people's living standards, people pay more and more attention to their own health status, especially the growing elderly population. Flexible wearable non-invasive detection of physiological parameters such as pulse, blood pressure, joint flexion and extension h...

Images