Method for synthesizing and purifying electronic-grade hydrogen peroxide

Abstract

The invention discloses an electronic grade hydrogen peroxide synthesis and purification method, which comprises the following steps: a synthesis process and a purification process, the synthesis process is an electrolysis process, when the concentration of hydrogen peroxide in the electrolysis process reaches 0.5-2 wt%, an electrolyte containing hydrogen peroxide is subjected to purification process treatment, and the purification process comprises the steps of distillation and ultra-purification. Electronic-grade hydrogen peroxide meeting the SEMI G2 standard can be prepared through the distillation process step, and ultra-pure electronic-grade hydrogen peroxide meeting the SEMI G3, G4 and G5 standard or with higher purity can be produced through the further ultra-purification step. The method has the beneficial effects that relatively low-cost high-purity water and high-purity oxygen are adopted as raw materials, the total organic carbon content in the prepared hydrogen peroxide can be ignored, after inorganic impurities are efficiently removed through a mature distillation process, the electronic-grade hydrogen peroxide with higher purity is prepared by further utilizing an ultra-purification process, and the method is suitable for industrial production. The process flow is simple, the production cost is low, and potential industrial application value is achieved.

Description

technical field [0001] The invention relates to the field of wet electronic chemicals, in particular to a method for synthesizing and purifying electronic-grade hydrogen peroxide using an electrolysis method to synthesize high-quality hydrogen peroxide as a raw material. Background technique [0002] Hydrogen peroxide (aqueous hydrogen peroxide solution) is an important chemical raw material with clean and non-polluting properties. It is widely used in printing and dyeing, papermaking, environmental protection, food, chemical synthesis and semiconductor industries. The industrial production methods of hydrogen peroxide include barium peroxide method, ammonium persulfate method, anthraquinone method, isopropanol method and oxygen cathode reduction method. Among them, the anthraquinone method is the mainstream industrial production method at home and abroad, and its total chemical reaction equation is H 2 +O 2 =H 2 O 2 , its advantages are mature technology, high degree of...

AI Technical Summary

Problems solved by technology

However, the electrochemical method also has technical disadvantages, such as the low added value of hydrogen precipitated by the cathode of the bismuth vanadate method, and the anode of the oxygen cathode reduction method requires the use of precious metal platinum, etc.

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