The invention discloses an electronic grade
hydrogen peroxide synthesis and purification method, which comprises the following steps: a synthesis process and a purification process, the synthesis process is an
electrolysis process, when the concentration of
hydrogen peroxide in the
electrolysis process reaches 0.5-2 wt%, an
electrolyte containing
hydrogen peroxide is subjected to purification process treatment, and the purification process comprises the steps of
distillation and ultra-purification. Electronic-grade
hydrogen peroxide meeting the SEMI G2 standard can be prepared through the
distillation process step, and ultra-pure electronic-grade
hydrogen peroxide meeting the SEMI G3, G4 and G5 standard or with higher purity can be produced through the further ultra-purification step. The method has the beneficial effects that relatively low-cost high-purity water and high-purity
oxygen are adopted as raw materials, the
total organic carbon content in the prepared
hydrogen peroxide can be ignored, after inorganic impurities are efficiently removed through a mature
distillation process, the electronic-grade hydrogen peroxide with higher purity is prepared by further utilizing an ultra-purification process, and the method is suitable for industrial production. The process flow is simple, the production cost is low, and potential industrial application value is achieved.