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Method for preparing zirconium oxide porcelain coating on self assembled functional organosilane single layer film

A self-assembled single-layer, zirconia ceramic technology, applied to the surface coating liquid device, pre-treated surface, coating, etc., to achieve low surface roughness, simple preparation process, anti-wear and anti-friction and anti-adhesion properties Good results

Inactive Publication Date: 2005-01-12
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing zirconia ceramic film on the surface of functional organosilane self-assembled monolayer film, so as to solve the protection and lubrication problems of materials in micromachines

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Embodiment 1: The preparation of the zirconia ceramic film on the surface of the sulfonated MPTS self-assembled monolayer film includes two steps of A and B in turn:

[0025] A. Preparation of sulfonated MPTS self-assembled monolayer film:

[0026] (1) Use a single crystal silicon wafer as a substrate, wash it with a mixed solution (Piranha solution) of concentrated sulfuric acid and hydrogen peroxide with a volume ratio of 70%: 30% at 90 ° C, rinse with distilled water, and 2 air dry;

[0027] (2) Prepare 1×10 -3 Anhydrous toluene solution of M MPTS;

[0028] (3) Quickly immerse the cleaned monocrystalline silicon wafer in the prepared MPTS dilute solution and react at room temperature for 12 hours; after taking it out, wash it thoroughly with chloroform and deionized water and blow it dry with nitrogen gas to obtain MPTS monolayer film;

[0029] (4) The substrate on which the MPTS self-assembled monolayer film was prepared was then immersed in a mixed solution of ...

Embodiment 2

[0044] Embodiment 2: The preparation of sulfonated TSHT self-assembled monolayer film surface zirconia ceramic film, including two steps of A and B in turn:

[0045] A. Preparation of sulfonated TSHT self-assembled monolayer film:

[0046] (1) Using the glass slide as the substrate, the cleaning method is the same as in Example 1;

[0047] (5) prepare the dicyclohexyl solution of 1% (volume ratio) TSHT;

[0048] (6) Quickly immerse the cleaned glass slide in the prepared dilute TSHT solution and react at room temperature for 5 hours, take it out, wash it thoroughly with chloroform and dry it with nitrogen, and obtain a TSHT monolayer film with certain order;

[0049](7) The substrate prepared with TSHT self-assembled monolayer film was immersed in 30ml oxidant (2KHSO 5 ·KHSO 4 ·K 2 SO 4 ) aqueous solution, reacted at room temperature for 6 hours; after taking it out, thoroughly washed it with acetone, deionized water, and chloroform, and finally dried it with nitrogen to ...

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PUM

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Abstract

A process for preparing the zirconium oxide ceramic film on the surface of functional self-assembled organic silane film includes such steps as preparing said self-assembled organic silane film containing S on the surface of monosilicon or glass chip, oxidizing the S-contained radicals on the surface of film to become sulfo radicals, and preparing zirconium oxide ceramic film in the aqueous solution by chemical adsorption. Its advantages are low cost, low poison, high density, and uniformly, large area, and high antiwear nature.

Description

Technical field: [0001] The invention relates to a method for preparing a zirconia ceramic film on the surface of a functional organosilane self-assembled monolayer film. Background technique: [0002] Zirconia ceramic film has excellent properties such as high temperature resistance, corrosion resistance, good chemical stability, high mechanical strength, low friction coefficient and long service life, etc. It can be used as a protective coating in harsh environments and in micro-electromechanical systems (simplified It is used as anti-friction or anti-wear material in micromachine (Micromachine) and magnetic recording system. Therefore, it has become one of the most widely studied ceramic materials in the field of functional materials and tribology in recent years. At present, the preparation techniques of zirconia ceramic thin films mainly include vapor phase deposition, sputtering deposition, plasma spraying and sol-gel method, etc. [0003] In the past two decades, se...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C3/02B05D1/18B05D1/36B05D3/10
Inventor 杨生荣王金清陈淼徐洮薛群基
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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