Controlling the temperature of a substrate in a film deposition apparatus

Abstract

A system and method for that allows one part of an atomic layer deposition (ALD) process sequence to occur at a first temperature while allowing another part of the ALD process sequence to occur at a second temperature. In such a fashion, the first temperature can be chosen to be lower such that decomposition or desorption of the adsorbed first reactant does not occur, and the second temperature can be chosen to be higher such that comparably greater deposition rate and film purity can be achieved. Additionally, the invention relates to improved temperature control in ALD to switch between these two thermal states in rapid succession. It is emphasized that this abstract is provided to comply with rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application claims the benefit of U.S. Provisional Application No. 60 / 251,795, filed Dec. 6, 2000, U.S. Provisional Application No. 60 / 254,280, filed Dec. 6, 2000 and U.S. Utility Applications Ser. Nos. 09 / 812,285, 09 / 812,352, and 09 / 812,486; all filed Mar. 19, 2001.BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates to the field of film deposition, and more particularly, to a method and apparatus for improving and enhancing temperature control in atomic layer deposition (ALD). [0004] 2. Description of the Background Art [0005] The present invention relates generally to the field of advanced thin film deposition methods commonly used in the semiconductor, data storage, flat panel display, as well as allied and other industries. More particularly, the present invention relates to improved atomic layer deposition whereby the kinetics of the adsorption of the first precursor and the subseq...

AI Technical Summary

Benefits of technology

"The patent describes a method and system for depositing a film on a substrate in a chamber. The method involves adjusting the temperature of the substrate, introducing a reactant gas, adsorbing the gas onto the substrate, evacuating excess gas, adjusting the temperature again, introducing a second reactant gas, and evacuating excess gas. The system includes the same components and a means for controlling the temperature. The technical effect of this patent is to provide a reliable and efficient method for depositing films on substrates."

Problems solved by technology

This transition is driven by both the increasing impact of the RC interconnect delay on device speed and by the electromigration (i.e., the self-diffusion of metal along interconnects, thereby affecting reliability) limitations of aluminum based conductors for sub 0.25 μm device generations.

However, the burden now shifts to the metal deposition step(s) as the copper must fill predefined high aspect ratio trenches and / or vias in the dielectric.

Two major challenges exist for copper wiring technology: the barrier and seed layers.

This leads to electrical leakage between metal wires and poor device performance.

The dielectric material can be a low dielectric constant i.e., low-k material (used to reduce inter- and intra-line capacitance and cross-talk) which typically suffers from poorer adhesion characteristics and lower thermal stability than traditional oxide insulators.

An inferior adhesion layer will, for example, lead to delamination at either the barrier-to-dielectric or barrier-to-copper interfaces during any subsequent anneal and / or chemical mechanical planarization (CMP) processing steps leading to degradation in device performance and reliability.

A discontinuity in the seed layer will lead to sidewall voiding, while gross overhang will lead to pinch-off and the formation of top voids.

However, as device geometries have decreased, the step coverage limitations of PVD have increasingly become an issue since it is inherently a line-of-sight process.

As a result, PVD is unable to deposit thin continuous films of adequate thickness to coat the sides and bottoms of high aspect ratio trenches and vias.

Moreover, medium / high-density plasma and ionized PVD sources developed to address the more aggressive device structures are still not adequate and are now of such complexity that cost and reliability have become serious concerns.

Unfortunately, CVD requires comparatively high deposition temperatures, suffers from high impurity concentrations which impact film integrity, and have higher cost-of-ownership due to long nucleation times and poor precursor utilization efficiency.

This generally leads to high film resistivities (up to several orders of magnitude higher than PVD), and other degradation in film performance.

These deposition, temperatures and impurity concentrations make CVD Ta and TaN unusable for IC manufacturing, in particular for copper metallization and low-k integration.

Although the deposition temperature has been reduced by increased fragmentation (and hence increased reactivity) of the precursor gases in the gas phase via a plasma, the same fragmentation leads to the deposition of unwanted impurities.

Gas-phase fragmentation of the precursor into both desired and undesired species inherently limits the efficacy of this approach.

In practice, ALD is complicated by the painstaking selection of a process temperature setpoint wherein both: 1) at least one of the reactants sufficiently adsorbs to a monolayer and 2) the surface deposition reaction can occur with adequate growth rate and film purity.

If the temperature is too low, the deposition reaction may be incomplete (i.e., very slow), not occur at all, or lead to poor film quality (e.g., high resistivity and / or high impurity content).

Since the ALD process is entirely thermal, selection of available precursors (i.e., reactants) that fit the temperature window becomes difficult and sometimes unattainable.

Due to the above-mentioned temperature-related problems, ALD has been typically limited to the deposition of semiconductors and insulators as opposed to metals.

Chlorine is a corrosive, can attack copper, and lead to reliability concerns.

The above process is unsuitable for copper metallization and low-k integration due to the high deposition temperature, slow deposition rate, and chlorine impurity incorporation.

Gaseous, diatomic hydrogen (H2) is an inefficient reducing agent due to its chemical stability, and elemental zinc has low volatility (e.g., it is very difficult to deliver sufficient amounts of Zn vapor to the substrate) and is generally incompatible with IC manufacturing.

Unfortunately, due to the temperature conflicts that plague the ALD method and lack of kinetically favorable second reactant, serious compromises in process performance result.

Using such a technique, Ta ALD films have been deposited at 0.16 to 0.5 Å / cycle at 25° C., and up to 1.67 Å / cycle at 250° C. to 450° C. Although REALD results in a lower operating substrate temperature than all the aforementioned techniques, the process still suffers from several significant drawbacks.

However, such temperatures are still too high for some films of significant interest in IC manufacturing such as polymer-based low-k dielectrics that are stable up to temperatures of only 200° C. or less.

A low density or porous film leads to a poor barrier against copper diffusion since copper atoms and ions have more pathways to traverse the barrier material.

Moreover, a porous or under-dense film has lower chemical stability and can react undesirably with overlying or underlying films, or with exposure to gases commonly used in IC manufacturing processes.

Another limitation of REALD is that the radical generation and delivery is inefficient and undesirable.

RF (such as 13.56 MHz) plasma generation of radicals used as the second reactant such as atomic H is not as efficient as microwave plasma due to the enhanced efficiency of microwave energy transfer to electrons used to sustain and dissociate reactants introduced in the plasma.

Furthermore, having a downstream configuration whereby the radical generating plasma is contained in a separate vessel located remotely from the main chamber where the substrate is situated and using a small aperture to introduce the radicals from the remote plasma vessel to the main chamber body significantly decreases the efficiency of transport of the second radical reactant.

In the case of atomic H, these recombination pathways will lead to the formation of diatomic H2, a far less effective reducing agent.

Finally, ALD (or any derivative such as REALD) is fundamentally slow since it relies on a sequential process whereby each deposition cycle is comprised of at least two separate reactant flow and evacuation steps which can occur on the order of minutes with conventional valve and chamber technology.

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