Method for depositing crystalline titania nanoparticles and films

Abstract

The present invention provides a one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.

Description

[0001]The present application claims priority from provisional application 60 / 899,892, the content of which is expressly incorporated by reference herein.FIELD OF THE INVENTION [0002]This invention is related to a low-temperature process of depositing nanoparticles and nanocomposite films of crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation.DESCRIPTION OF THE PRIOR ART [0003]TiO2 is a multi-functional material that has attracted extensive research and development efforts in the last two decades. New applications in energy and environmental fields are being pursued, in addition to its traditional usage as a white pigment. The new applications of TiO2 include gas sensors, electrochromic devices, dye-sensitized solar cells, and photocatalysts. Various photocatalysts have been developed using TiO2 and have applied to fields such as air / water purification, self-cleaning, anti-fogging (hydrophilic / hydrophobic switching), sterilization, and ...

AI Technical Summary

Benefits of technology

[0017]The nanocomposite TiO2 films can be nanoparticle-assembled films produced by continuous deposition of TiO2 nanoparticles; or can be a composite with a host film embedded with nanoparticles of crystalline TiO2. The host film can be of titanium oxides (TiOX) in either crystalline or amorphous forms. It can also be any other host material such as ceramics or polymers. The nanocomposite films can be produced by alternately or simultaneously depositing the host material and crystalline TiO2 nanoparticles. A variety of material combinations can be easily realized by alternating targets of different materials inside the deposition chamber.

[0018]TiO2 has three major crystalline structures, including rutile, anatase, and brookite. Rutile is known as the thermally stable (high temperature) phase produced normally under a temperature higher than 500° C.; and anatase and brookite are metastable (low temperature) phases which can be transformed to rutile under high temperature. It is known that anatase usually exhibits better photocatalytic activities. However in some applications, rutile is preferred due to its slightly narrower band gap of 3.0 eV (compared to 3.2 eV for anatase), and higher dielectric constant. In the ultrafast PLA process, the crystal structures of TiO2 are no longer determined by the temperature of the substrate or the annealing process. They are mainly controlled by laser parameters, such as laser fluence (or pulse energy), pulse width, repetition rate, and wavelength. For the present invention, anatase and rutile or their mixtures are preferred; and a pulse width of 10 fs-100 ps, a laser fluence of 10 mJ / cm2-100 J / cm2 (pulse energy of 100 nJ-10 mJ), and a repetition rate of 1 kHz-100 MHz are preferred. Because laser fluence is a critical parameter in ultrafast PLA, this invention also employs an optical setup to transform the laser beam from a Gaussian profile to a “flat-top” profile to realize a uniform fluence on the target surface.

Problems solved by technology

These substrates are unstable under heating, and it is also very difficult to heat them uniformly over a large area.

In addition to the difficulties in heating, there is also a challenge for the conventional techniques to achieve desired morphologies and nanostructures while maintaining purity, stoichiometry, and homogeneity of TiO2.

The intense laser irradiation heats the material surface, and leads to surface melting and vaporization.

The major drawbacks of this technique include unavoidable formation of very large (micron-sized) droplets from the splashing of molten target and difficulty in large-area deposition.

However, the controllability of the crystallinity of TiO2 is still a challenge.

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