Method for depositing crystalline titania nanoparticles and films

a technology films, which is applied in the direction of polycrystalline material growth, crystal growth process, transportation and packaging, etc., can solve the problems of difficult uniform heating of crystalline titania nanoparticles over a large area, surface melting and vaporization, and the formation of very large droplets from the splashing of molten targets

Inactive Publication Date: 2008-08-07
IMRA AMERICA
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  • Abstract
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Benefits of technology

[0017]The nanocomposite TiO2 films can be nanoparticle-assembled films produced by continuous deposition of TiO2 nanoparticles; or can be a composite with a host film embedded with nanoparticles of crystalline TiO2. The host film can be of titanium oxides (TiOX) in either crystalline or amorphous forms. It can also be ...

Problems solved by technology

These substrates are unstable under heating, and it is also very difficult to heat them uniformly over a large area.
In addition to the difficulties in heating, there is also a challenge for the conventional techniques to achieve desired morphologies and nanostructures while maintaining purity, stoichiometry, and homogeneity of TiO2.
The intense ...

Method used

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  • Method for depositing crystalline titania nanoparticles and films
  • Method for depositing crystalline titania nanoparticles and films
  • Method for depositing crystalline titania nanoparticles and films

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Embodiment Construction

[0030]The present invention provides a one-step room-temperature process for depositing nanoparticles and nanocomposite (i.e., nanoparticle-assembled) films of crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium targets.

[0031]FIG. 1 illustrates the experimental system used in this invention. The system includes a vacuum chamber pumped by a turbo pump and a mechanical pump, a target manipulator which provides rotational and lateral movements for four targets of different materials, a substrate manipulator which provides heating and rotational and lateral movements for the substrate, a gas inlet through which reactive gases are provided and their pressures are appropriately adjusted, and an ion probe (Langmuir probe) to measure the ion current of the ablation plume, which is used as an indicator for focusing the laser beam on the target surface. When measuring the ion current, the ion probe is biased −50 V rel...

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Abstract

The present invention provides a one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.

Description

[0001]The present application claims priority from provisional application 60 / 899,892, the content of which is expressly incorporated by reference herein.FIELD OF THE INVENTION [0002]This invention is related to a low-temperature process of depositing nanoparticles and nanocomposite films of crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation.DESCRIPTION OF THE PRIOR ART [0003]TiO2 is a multi-functional material that has attracted extensive research and development efforts in the last two decades. New applications in energy and environmental fields are being pursued, in addition to its traditional usage as a white pigment. The new applications of TiO2 include gas sensors, electrochromic devices, dye-sensitized solar cells, and photocatalysts. Various photocatalysts have been developed using TiO2 and have applied to fields such as air / water purification, self-cleaning, anti-fogging (hydrophilic / hydrophobic switching), sterilization, and ...

Claims

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Application Information

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IPC IPC(8): C23C14/26
CPCC30B23/08Y10T428/25C30B29/16C23C14/083C23C14/28
Inventor HU, ZHENDONGCHE, YONGLIU, BING
Owner IMRA AMERICA
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