Magnetic sandwich material based on nanocrystalline soft magnetic thin film and its preparing method
A nanocrystalline soft magnetic and sandwich technology, which is applied in the field of information storage, can solve problems affecting data security, magnetoresistance effect reduction, and deterioration of flipping characteristics, and achieve superior flipping characteristics, reduce overall thickness, and stabilize single domain states. Effect
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[0047] The following will take the nanocrystalline CoNbZr / Cu / Co structure as an example to illustrate the preparation method of the magnetic sandwich material proposed by the present invention:
[0048] 1. Cleaning and handling of substrates
[0049] Prepare 10×10mm 2 Square single crystal Si(100) substrate, boiled with concentrated sulfuric acid to remove surface stains and impurities, ultrasonically cleaned with acetone, then soaked in hydrofluoric acid for 30 minutes to remove the surface oxide layer, ultrasonically cleaned with deionized water, and ultrasonically cleaned with acetone; then placed Dry on the filter paper, place on the substrate holder 7, and finally send it into the vacuum chamber of the sputtering station.
[0050] 2. Deposition and nanocrystallization of amorphous soft magnetic layer
[0051] Evacuate the sputtering table vacuum chamber to 1 × 10 -5 Pa, argon Ar is introduced as the working gas, and the partial pressure of argon is 0.2Pa. Add 50W sput...
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