Solidified abrasive lapping polishing pad having self-modifying function and preparation method

A fixed abrasive, self-correcting technology, applied in grinding/polishing equipment, abrasives, grinding devices, etc., can solve the problems of abrasive splashing, uneven grinding cutting amount, abrasive waste processing efficiency, etc., to reduce surface roughness , Improve the mechanical properties, the effect of good workpiece flatness
CN101096080AInactive Publication Date: 2008-01-02NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
Publication Date
2008-01-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a grinding and polishing pad of consolidation abrasive with self-adjusting function and the preparation method, belonging to ultra-precision grinding and polishing machining technical field, which is characterized in that components of the abrasive layer (3)comprises 1-20% by wt of abrasive with granularity of 1-40 nanometer, 20-80% by wt of acrylic pre-polymer, 1-3% by wt of free radical photo initiator, 0-2% by wt of poly (dimethylsiloxane) / acrylic polymer, 0-20% by wt of adjustment additive with system cross-linking density performance, and 5-40% by wt of acrylic active diluent. The preparation process comprises (1)mixing stock fully and uniformly, (2)preparing rigid polymer matrix, (3)daubing uniformly by screen-printing, and (4)solidifying by ultraviolet cured machine. The invention is provided with stable grinding and polishing performance and self-adjustment performance. It is suitable for precision machining.
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Description

Technical field:

[0001] The fixed abrasive grinding and polishing pad with self-correcting function and its preparation method relate to the technical field of ultra-precision grinding and polishing. Background technique:

[0002] Due to the popularization of standards such as TD-SCDMA and the demands of the digital home appliance and network markets, China's semiconductor market will reach a scale of US$68.6 billion in 2008. LED is an ideal choice for color display and decorative lighting of portable electronic devices (mobile phones, etc.) due to its high efficiency, easy driving, small size, thinness, durability, low noise and low cost. Therefore, its substrate materials Sapphire (Al 2 o 3 ) soared in demand. With the rapid development of high-tech such as the Internet and mobile communications, laser crystals (such as ruby, titanium sapphire, YVO 4 Crystals, etc.), nonlinear optical crystals (such as KDP, KTP, BBO, LBO), piezoelectric crystals (crystals, lithium niob...

Claims

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