Method for depositing boron carbon nitrogen film on stainless steel substrate

A technology of boron carbon nitrogen and stainless steel, which is applied in the field of depositing boron carbon nitrogen thin films on stainless steel substrates, can solve problems such as limiting the scope of application, and achieve the effects of good combination, simple equipment, excellent anti-wear and anti-friction properties and anti-corrosion performance

Inactive Publication Date: 2010-07-07
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Studies have shown that ionic liquids as high-performance lubricants exhibit excellent tribological properties and are expected to be used in the lubrication of special machinery under harsh conditions; however, ionic liquids are highly corrosive to various metals, which limits their use. Practical application range

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] First, select four stainless steel sheets with a smooth surface, pre-clean them with tap water, wait for them to dry, then put them into acetone and ethanol for ultrasonic cleaning for 20 minutes each, take out the stainless steel sheets, dry them with ear washing balls, and quickly transfer them to a vacuum chamber , place on the substrate, and start vacuuming. Wait until the vacuum is less than 3.0×10 -3 At Pascal, 200 sccm of argon gas was introduced, the pressure was adjusted to 1 Pa, the pulse bias voltage applied to the substrate was -650V, the conduction ratio was 0.8, and the substrate was cleaned by plasma glow for 10 minutes. After cleaning, feed high-purity nitrogen (120 sccm) and argon (80 sccm) reactive sputtering gases to sputter graphite targets (purity: 99.999%) and boron targets (purity: 99.9%) respectively. The deposition pressure was 1Pa, the deposition power was 1000W, the substrate bias was between -200V (frequency 20KHz, duty cycle 80%), the dista...

Embodiment 2

[0016] From the infrared spectrum of the BCN film, it can be seen that at 610-825cm -1 And 930~1700cm -1 These two regions have broad absorption peaks, for 610-825cm -1 The broad absorption peak in the region is caused by the bending vibration of C-C (~700cm -1 ) and bending vibration in the hexagonal ring of B-N-B (~780cm -1 ) is produced by absorption superposition. For 930~1700cm -1 The broad absorption peaks in the region can be divided into three peaks by computer fitting, and the peak positions are 1194cm -1 , 1368cm -1 and 1591cm -1 . Among them, 1194cm -1 Can be considered as vibration absorption of B-C bond, 1368cm -1 It is the vibration absorption of B-N skeleton, because the characteristic absorption peak of C=N appears at 1600cm -1 nearby, so 1591cm -1 Then belong to C=N. In addition, it can also be seen from the map that at 2170cm -1 There is also a weak absorption peak nearby, which is similar to the 2200cm -1 The characteristic absorption peaks of ...

Embodiment 3

[0018] The tribological properties of the BCN film were evaluated on the UMT-2MT friction and wear testing machine manufactured by CETR Company of the United States. The reciprocating sliding method was adopted, the sliding frequency was 5Hz, the amplitude was 2.5mm, the friction time was 120min, the normal load was 10N, and the pair was 4mm steel ball, 1-n-butyl-3-methylimidazolium tetrafluoroborate ionic liquid as lubricant. The experimental results show that the film has excellent tribological properties, its friction coefficient can reach 0.05, and its wear rate is 5.6×10 -9 mm 3 / Nm.

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Abstract

The invention discloses a method for depositing a boron carbon nitrogen film on a stainless steel substrate. The film can resist corrosion of the ionic liquid. The method adopts the medium frequency magnetron sputtering physical vapor deposition technology to directly deposit a layer of boron carbon nitrogen film on the stainless steel substrate.

Description

technical field [0001] The invention relates to a method for depositing a boron-carbon-nitrogen thin film on a stainless steel substrate, and the thin film can resist ion liquid corrosion. Background technique [0002] At present, the development of space technology puts forward higher and higher requirements on the vapor pressure and lubricating performance of space liquid lubricants. In many harsh working conditions, such as low pour point (below -50°C), high viscosity index (above 120), high thermal oxidation resistance, flame resistance, ultra-high vacuum, radiation resistance and other special circumstances, petroleum-based lubrication The performance of lubricants is difficult to meet these requirements, so the design and preparation of high-performance liquid lubricants is one of the international frontiers in the field of tribology. Ionic liquid compounds are different from traditional neutral compounds. They have unique solubility, good thermal stability, good low-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06
Inventor 杨生荣陈友明张俊彦
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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