Electro-deposition photoresist and preparation method and film forming method thereof
A photoresist and electrodeposition technology, applied in the direction of optomechanical equipment, photosensitive materials for optomechanical equipment, optics, etc., can solve problems such as line gaps, etch, thin line product scrapping, etc., and achieve low cost , easy industrialization, and simple process
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[0049] A method for preparing an electrodeposited photoresist, comprising the following steps: 1) preparation of the water-based acrylic copolymer matrix resin; 2) preparation of the photoresist; the prepared water-based acrylic copolymer The solid content of the matrix resin is 42.0-49.0wt%, and the acid value is 89-93; the solid content of the prepared photoresist is 17-20wt%, and the pH is 7-9.
[0050] A method for forming a film of an electrodeposition photoresist, comprising the steps of: loading the above photoresist into an electrodeposition tank, using a positively charged copper foil substrate as an anode, and two negatively charged stainless steel plates As a cathode, vertically suspended and immersed in the photoresist for electrodeposition film formation, the conditions are: deposition temperature: 23-25°C; application voltage: 60-90V; DC current density: 40-60mA / dm 2 ; Deposition time: 60-90s; Drying time: (10-15min) × (90-105°C).
Embodiment 1
[0053] The ratio is as follows:
[0054] Acrylic 100 parts
[0055] 400 parts of tert-butyl methacrylate
[0056] Ethyl acrylate 250 parts
[0057] 230 parts of 2-ethylhexyl acrylate
[0058] Benzoyl peroxide (BPO) 10 parts
[0059] Azobisisobutyronitrile (AIBN) 8 parts
[0060] tert-butyl cellosolve / isopropanol 920 parts / 260 parts
[0061] PAG-1 / PAG-2 2 parts / 4 parts
[0062] Benzophenone / benzoin dimethyl ether (DMPA) 1.5 parts / 1.5 parts
[0063] TMPTA / HDDA 30 parts / 20 parts
[0064] Polyoxyethylene 2-octylphenol ether 15 parts
[0065] Vapor SiO 2 / talcum powder 20 parts / 10 parts
[0066] Acetone 50 parts
[0067] 10 parts of triethylamine
[0068] 700 parts of deionized water
[0069] In the flask equipped with stirrer, reflux condenser, thermometer, constant pressure dropping funnel and nitrogen conduit, add the mixed organic solvent of 920g tert-butyl cellosolve and 260g isopropanol, after introducing N 2While stirring, heat to 80°C and keep it constant; ...
Embodiment 2
[0089] The ratio is as follows:
[0090] 100 parts of methacrylic acid
[0091] 400 parts of tert-butyl acrylate
[0092] 250 parts of hydroxyethyl methacrylate
[0093] Laurate methacrylate 230 parts
[0094] Michler's ketone 3 parts
[0095] PETA / TPGDA 30 parts / 20 parts
[0096] Glycerin polyoxyethylene ether (G-18) 15 parts
[0097] Other component proportioning is with embodiment one.
[0098] The synthesis of the matrix resin, the preparation of the ED photoresist, the ED film-forming process and the test method are the same as in Example 1, and the test results are as follows:
[0099] The average molecular weight of the base resin is 27700, the acid value is 90, and the solid content is 46.5wt%.
[0100] The solid content of the ED photoresist was 18.2 wt%, pH 8.1.
[0101] The test results of the ED film are as follows:
[0102] Thickness (μm): 7-9
[0103] Touch dry time (s): 17-21
[0104] Pencil hardness (H): 3
[0105] Adhesion (Level): 0
[0106] Deve...
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