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Method for manufacturing grid of millimeter-wave traveling wave tube

A traveling wave tube and millimeter wave technology, which is applied in the field of preparation of traveling wave tube parts, can solve the problems of many spokes, high probability of grid ignition, narrow bandwidth beam, etc. Actionable effect

Inactive Publication Date: 2011-09-14
NANJING SANLE ELECTRONICS INFORMATION IND GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Millimeter-wave traveling-wave tubes have the characteristics of wide bandwidth, narrow beam, less influence of climate on propagation, small size and easy miniaturization, etc. Among them, the grid is an important part of the millimeter-wave traveling-wave tube, but the existing processing method of the spherical grid is The machine tool stamps into a spherical rough blank and then uses EDM to process the grid. Most of the grids prepared by this method have large burrs, and the concentricity and symmetry of the wheels are difficult to guarantee. The millimeter wave or miniaturized grid-controlled traveling wave tube The grid size is too small and the spokes are too many, it is almost impossible to use EDM
Moreover, due to the unreasonable design of the tooling when the surface of the grid is formed in the prior art, the radius of curvature of the crown of the grid is often incorrect or the wires are broken, and the pass rate is low; There is a high probability of sparking on the net, and the quality of the assembled traveling wave tube is unstable

Method used

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  • Method for manufacturing grid of millimeter-wave traveling wave tube
  • Method for manufacturing grid of millimeter-wave traveling wave tube
  • Method for manufacturing grid of millimeter-wave traveling wave tube

Examples

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Embodiment 1

[0029] Example 1 Preparation of the grid of the millimeter wave traveling wave tube

[0030](a) Design the size of the plane grid, select the grid molybdenum base material with a thickness of 0.06mm according to the plane grid size, remove the impurity particles on the surface of the grid molybdenum base material, and rotate it on the grid molybdenum base material surface (500 Rotation per minute at low speed, dripping glue, 3000 rpm accelerated rotation, glue rejection, volatile solvent) coating a novolac resin positive photoresist with a thickness of 1 μm, and then baking on a hot plate at 110°C for 30 seconds in a vacuum state , and then align the mask plate and the scattering grating pattern with the photoresist on the grid molybdenum substrate, and then use an optical lithography machine (high-pressure mercury lamp) for projection exposure treatment. The developer solution is applied to the surface of the substrate and forms a puddle shape to keep the flow of the develope...

Embodiment 2

[0034] Example 2 Preparation of the grid of the millimeter wave traveling wave tube

[0035] (a) Design the size of the plane grid, select the grid molybdenum-rhenium substrate with a thickness of 0.08mm according to the size of the plane grid, remove the impurity particles on the surface of the grid molybdenum-rhenium substrate, and rotate it on the surface of the grid molybdenum-rhenium substrate. Coating (500 rpm low-speed rotation, dripping glue, 3000 rpm accelerated rotation, spinning glue, volatile solvent) coated with a novolac resin positive photoresist with a thickness of 0.6 μm, and then placed on a hot plate at 120 ° C under vacuum Baking for 30 seconds, then align the mask plate and 20 equally divided grating patterns with the photoresist on the grid molybdenum substrate, and then use an optical lithography machine (high pressure mercury lamp) for projection exposure treatment, and use spin-on immersion after exposure (Spray enough developer solution to the surface...

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Abstract

The invention discloses a method for manufacturing a grid of a millimeter-wave traveling wave tube. The method comprises the following steps of: firstly etching to obtain a planar grid with a required shape on a grid substrate by applying a photoetching technology, then, processing and forming the planar grid by a special spherical forming mold to obtain a spherical-crown-shaped grid, finally polishing the grid to obtain the grid of the millimeter-wave traveling wave tube. The method for manufacturing the grid of the millimeter-wave traveling wave tube, provided by the invention, has the advantages of strong maneuverability and reasonable technical design, and can be used for processing and manufacturing small-size, thin and complexly-shaped spherical grids with special size requirement; the grid manufactured with the method disclosed by the invention has the advantages of no burrs on the surface, low fire striking probability, high qualification rate, stable performances and very important application value.

Description

[0001] technical field [0002] The invention designs a method for preparing a part of a traveling wave tube, and in particular relates to a method for preparing a grid of a millimeter wave or miniaturized grid-controlled traveling wave tube. Background technique [0003] The traveling wave tube is a microwave electron tube that realizes the amplification function by modulating the speed of the electron injection. The traveling wave tube is characterized by wide frequency band, high gain, large dynamic range and low noise. Difference / center frequency) can reach more than 100%, the gain is in the range of 25-70 decibels, and the noise figure of the low-noise traveling wave tube can reach as low as 1-2 decibels. Important microwave electronic devices for electronic equipment such as communications, satellite communications, live TV satellites, navigation, remote sensing, remote control, and telemetry. Millimeter-wave traveling-wave tubes have the characteristics of wide bandw...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/16G03F7/00
Inventor 吴亚琴刘洋朱军方
Owner NANJING SANLE ELECTRONICS INFORMATION IND GRP
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