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Application of nanometer aluminum oxide-based composite ceramic coating

A nano-alumina and composite ceramic technology, applied in coating, metal material coating process, melt spraying and other directions, can solve the problems of high raw material cost and low insulation performance of coating, achieve low porosity and improve insulation performance , the effect of reducing intrinsic internal stress

Inactive Publication Date: 2012-05-09
安徽禹恒材料技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the prior art, widely used thermal spraying ceramic coating materials are alumina and yttrium oxide ceramics. Although these two ceramics have a good protective effect on fluorine-containing plasma, there are still the following problems: (1) coating The insulating properties of the layer are lower
Existing alumina or yttrium oxide coatings cannot be used for a long time. For example, the service life of the bottom plate coating of plasma etching equipment is often less than 2 years and needs to be replaced
(3) Compared with alumina ceramic materials, yttrium oxide ceramics have better plasma corrosion resistance, but their raw material costs are high

Method used

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  • Application of nanometer aluminum oxide-based composite ceramic coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] Example 1: Preparation of nano-alumina-based composite ceramic coating on the surface of the bottom plate of dry etching equipment

[0014] (1) Preparation of alumina-based fine powder: Weigh 50 grams of alumina, zirconia and lanthanum oxide mixed powder (weight percentage distribution is 38.6wt% alumina, 42.4wt% lanthanum oxide and 19wt% zirconia), Add 75 ml of alcohol and 200 g of alumina balls, wet ball mill and mix for 24 hours, then dry at 100°C, pass through a 100-mesh sieve to obtain alumina-based fine powder;

[0015] (2) Spray ceramic coating: Use the bottom plate of dry etching equipment as the base material for coating spraying. Before spraying, the bottom plate is sandblasted to remove surface pollutants and roughen the surface. Atmospheric plasma spraying equipment is used for spraying, and the alumina-based fine powder obtained in step (1) is evenly sprayed on the bottom plate. The spraying parameters are: argon gas 40 L / Min, hydrogen gas 10 L / Min, voltage...

Embodiment 2

[0017] Example 2: In Electrostatic chuck surface of vacuum deposition equipment Preparation of alumina-based composite ceramic coating

[0018] (1) Preparation of alumina-based fine powder: alumina-zirconia-yttria composite material as raw material, (weight percentage ratio is 55.8wt% alumina, 28.6wt% yttrium oxide and 15.6wt% zirconia), and According to the method described in Example 1, ball milling was carried out to obtain alumina-based fine powder;

[0019] (2) Spray ceramic coating: according to the method described in Example 1, spray the alumina-based fine powder obtained in step (1) onto the surface of the electrostatic chuck of the vacuum deposition equipment to form a coating of 1000-1100 μm by plasma spraying method . In addition, a coating of about 200 μm was sprayed at the same time for testing and comparison.

[0020] The coating obtained in this example was analyzed with a scanning electron microscope (SEM), and the results showed that the alumina-zirconia...

Embodiment 3

[0021] Example 3: In The inner surface of the cavity of the dry etching equipment Preparation of nano-alumina composite ceramic coating

[0022] (1) Preparation of alumina-based fine powder: alumina-zirconia-yttria composite material as raw material, (weight percentage ratio is 55.8wt% alumina, 28.6wt% yttrium oxide and 15.6wt% zirconia), and According to the method described in Example 1, ball milling was carried out to obtain alumina-based fine powder;

[0023] (2) Spray ceramic coating: The inner surface of the cavity of the dry etching equipment is used as the substrate material for coating spraying, and the substrate is sandblasted before spraying. Spraying uses supersonic flame spraying (HVOF) equipment to uniformly spray the alumina-based powder obtained in step (1) onto the substrate. The spraying parameters are: oxygen 240 L / Min, propane 72 L / Min, compressed air 400 L / Min Min, the thickness of the formed coating is 1800-1900 μm. In addition, a coating of about 2...

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Abstract

The invention relates to a nanometer aluminum oxide-based coating technology, in particular to a nanometer aluminum oxide-based composite ceramic coating for resisting corrosion of plasma gas in a high-voltage environment. The nanometer aluminum oxide-based composite ceramic coating is prepared by a hot spraying method and has the thickness being 50mum to 2mm; and the nanometer aluminum oxide-based composite ceramic coating comprises the following components of 20-75 percent by weight of aluminum oxide, 10-40 percent by weight of zirconium oxide and 10-60 percent by weight of rare earth oxide, wherein the rare earth oxide is any one or a combination of more than two of yttrium oxide, lanthanum oxide, gadolinium oxide, cerium oxide, dysprosium oxide, neodymium oxide and europium oxide. Thenanometer aluminum oxide-based composite ceramic coating has a compact nanometer structure, the capability of resisting electric breakdown of 24-29KV / MM and the function of resisting corrosion of fluorine-containing plasma. In various plasma devices, the ceramic coating is used on the surfaces of related parts, so that the conditions of frequent maintenance, cleaning and replacement can be avoided.

Description

technical field [0001] The invention relates to nano-alumina coating technology, in particular to a nano-alumina-based composite ceramic coating resistant to plasma gas corrosion in a high-voltage environment. Background technique [0002] Plasma etching, vacuum deposition and other equipment widely used in the semiconductor and LCD flat panel display manufacturing industry, due to the severe corrosion of plasma and daily physical wear, often need to clean the residue particles caused by corrosion and wear. For the protection of equipment, the traditional method is to use anodized aluminum oxide passivation film and sintered ceramic sheet. As the size of silicon wafers and LCD flat panel displays continue to increase, the related manufacturing equipment has also become larger and larger, and the power of the plasma used in the process has also become higher and higher, which puts higher demands on the performance of protective coatings. high demands. Traditional methods ha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C4/10C23C4/11C23C4/129C23C4/134
Inventor 汪灏程敬卿
Owner 安徽禹恒材料技术有限公司
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