Composite abrasive grain in grain/alumina core-shell structure and preparation method and application of composite abrasive grain
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
- Publication Date
- 2012-10-10
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Abstract
Description
technical field
[0001] The invention belongs to the technical field of abrasive processing, and relates to a composite abrasive grain with an abrasive grain / alumina core-shell structure, a preparation method and an application thereof. Background technique
[0002] With the vigorous development of optics, optoelectronics, digital products and IC industries, the demand for functional hard and brittle materials with various ultra-smooth surfaces is increasing. In the field of precision ultra-precision machining, chemical mechanical polishing technology is the most effective method to obtain an ultra-smooth and non-damaging surface. The traditional chemical mechanical polishing process uses free abrasives. This method has disadvantages such as low processing efficiency, high cost, serious pollution, and poor process controllability. The bonded abrasive chemical mechanical polishing effectively overcomes the above shortcomings and achieves planarization. The amount of material ...