High-performance gas sensor based on laminated structure and preparation method for high-performance gas sensor

A technology of gas sensor and laminated structure, which is applied in the field of gas sensor to achieve the effect of improving performance, improving response recovery speed, and good conductivity

Active Publication Date: 2015-06-17
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The problem to be solved by the present invention is to overcome the technical disadvantages of the existing composite method that cannot fully utilize the characteristics of the two materials, an

Method used

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  • High-performance gas sensor based on laminated structure and preparation method for high-performance gas sensor

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preparation example Construction

[0023] The invention provides a method for preparing an ordered composite gas sensor based on a heterogeneous structure, which specifically includes the following steps:

[0024] (1) Preparation of the substrate:

[0025] Select aluminum oxide, silicon oxide, glass or sapphire inert material as the substrate, ultrasonically clean the substrate in acetone solution to remove surface stains, then take out the substrate and wash off the residual organic solution with deionized water.

[0026] Metal conductive electrodes, such as gold, silver, and platinum, are fabricated on the substrate by screen printing or mask lithography to obtain a sensor substrate.

[0027] (2) Conductive layer preparation:

[0028] Tin oxide or zinc oxide is selected as a raw material, and a layer of conductive layer material is produced on the sensor substrate by screen printing, hydrothermal synthesis, and laser pulse deposition.

[0029] (3) Sensitive layer preparation:

[0030] Tungsten trioxide, ti...

example 1

[0035] Alumina was chosen as the substrate. The alumina substrate was ultrasonically cleaned in an acetone solution for 10 minutes to remove surface stains, and then the substrate was taken out and cleaned with deionized water to remove residual organic solution. The platinum conductive electrode platinum was fabricated on the substrate by screen printing to obtain the sensor substrate.

[0036] Select tin oxide powder as a raw material, fully mix terpineol, butyl carbitol acetate, and dibutyl phthalate according to a mass ratio of 6:3:1 to form an organic solvent, and then mix the tin oxide raw material powder with The organic solvents were mixed according to the mass ratio of 6:4, ball milled at a speed of 400 rpm for 3 hours to obtain a slurry, and a layer of tin oxide conductive layer material was printed on the sensor substrate by screen printing. Then put it into an oven at 120° C. and keep it warm for 2 hours, so that the conductive layer material is cured.

[0037] S...

example 2

[0040] Choose a glass material as the substrate. The glass substrate was ultrasonically cleaned in acetone solution for 10 minutes to remove surface stains, and then the substrate was taken out and cleaned with deionized water to remove residual organic solution. A silver conductive electrode is fabricated on the substrate by mask photolithography to obtain a sensor substrate.

[0041] Choose zinc nitrate as solute, take deionized water as solvent, prepare 0.05mol / L zinc element solution, add hexamethylenetetramine with zinc nitrate molar ratio 1: 1 as ammonia releasing agent, obtain zinc oxide growth solution, put The substrate was placed in a growth solution, and hydrothermal growth was performed at 90° C. for 4 hours. After taking it out, rinse it repeatedly with deionized water, and finally dry it in an oven at 80°C to obtain a conductive layer of zinc oxide.

[0042]After mixing concentrated hydrochloric acid and deionized water at a volume ratio of 1:1, drop tetrabutyl...

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Abstract

The invention discloses a high-performance gas sensor based on a laminated structure and a preparation method for the high-performance gas sensor. The preparation method comprises the following steps: adopting stannic oxide and zinc oxide as conducting layers, using tungsten trioxide, titanium dioxide, copper oxide and cobaltous oxide as sensitive layers, and meanwhile using palladium, platinum noble metal, cadmium sulfide and a cadmium stannide sensitizer to modify the prepared sensitive layers, so as to obtain the gas sensor. According to the method, the modified gas sensitive material is placed at the top layer by a lamination manner, and can be sufficiently reacted with atmosphere in the environment, so as to improve the responsibility of the gas sensor; the material with the better conductivity is placed at the bottom layer, so that the electron concentration change in the sensitive layers can be quickly transferred to an external circuit by the material, and the response and recovery time of the gas sensor can be shortened. Therefore, the method can be used for greatly improving the performances of the gas sensor.

Description

technical field [0001] The invention belongs to the field of gas sensitive sensors, and in particular relates to a gas sensitive sensor with a laminated structure and a preparation method thereof. The preparation method of the invention is simple, and can effectively improve the performance of the gas sensor. Background technique [0002] A gas sensor is a device or device that can sense a certain gas and its concentration in the environment and convert the information about the gas type and concentration into an electrical signal for detection, monitoring, analysis, and alarm. In recent years, gas sensors have been widely used in a series of major demand fields such as food safety, environmental monitoring, public safety, and process control, and have broad application prospects. [0003] With the deepening of gas sensor research and application requirements, the current research hotspots in the field of gas sensor are to reduce the detection limit, improve sensitivity, im...

Claims

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Application Information

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IPC IPC(8): G01N27/12
Inventor 郭新李华曜蔡泽星丁俊超
Owner HUAZHONG UNIV OF SCI & TECH
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