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A kind of electronic nose device and preparation method thereof

An electronic nose and device technology, applied in the field of electronic nose devices and their preparation, can solve the problems that electronic nose devices cannot meet the requirements of distributed sensing, achieve selectivity and difference, and overcome the effect of high working temperature

Active Publication Date: 2021-02-19
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problem that existing electronic nose devices cannot meet the requirements of distributed sensing, the present invention provides an electronic nose device and its preparation method, which adjusts the response range of each sensing unit by changing the grid voltage, and enhances or suppresses the response to a specific gas. Sensitivity, thereby realizing the selectivity and difference of FET-type gas sensor arrays for different gases

Method used

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  • A kind of electronic nose device and preparation method thereof
  • A kind of electronic nose device and preparation method thereof
  • A kind of electronic nose device and preparation method thereof

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preparation example Construction

[0047] The present invention also provides a preparation method for the above-mentioned electronic nose device, comprising the following steps:

[0048] S1. Forming a patterned FET-type metal electrode array on the substrate.

[0049] Process the metal electrode array pattern on the substrate through photoresist, and then deposit the metal electrode on the substrate by evaporation, sputtering, ion plating, laser pulse or molecular beam epitaxy. The specific steps are as follows:

[0050] S1.1, first use negative photoresist to perform first photolithography on a clean substrate to form M gate patterns;

[0051] S1.2. Using any method of evaporation, sputtering, ion plating, laser pulse or molecular beam epitaxy, metal electrodes are deposited on the substrate described in step S1.1, so that the gate pattern area forms a gate Pole 2;

[0052] S1.3, using the shadow mask metal mask as a mask, depositing a metal oxide on the metal electrode layer described in step S1.2 to form ...

Embodiment 1

[0068] refer to figure 1 , an electronic nose device, the substrate is a silicon oxide wafer, a layer of back gate is sputtered on the substrate first, and then Al 2 o 3 The dielectric layer, and finally the source and drain electrodes are sputtered, and the electrodes are in a 3×3 array. Graphene was grown by CVD, and the graphene was wet-transferred to the conductive channel region, and the conductive channel pattern was etched by oxygen plasma. The channel length was 70 μm and the width was 50 μm. Sputtering of TiO on the conductive channel of row N1 of the sensor array 2 Nanoparticles, N2 row evaporated SiO 2 Nanoparticles, row N3 is unmodified. During the gas sensing test, the grid voltage applied to the M1 column of the sensor array is -5V, the M2 column grid voltage is 0V, and the M3 column grid voltage is 5V.

[0069] Figure 4 is the response of the three conductive channels above column M2 of the sensor array to 100ppm methane, ethane, propane, ethanol, acetone...

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Abstract

The invention discloses an electronic nose device and a preparation method thereof. The electronic nose device comprises a substrate and N*M field effect transistor (FET) type gas sensor arrays formedon the substrate, each gas sensor in the arrays comprises a metal electrode and a graphical two-dimensional material conducting channel which are arranged on the substrate, the sensor arrays are subjected to same modification in rows, and the same gate voltage is applied in columns. In the gas sensitive test process, the response amplitude of each sensing unit is adjusted by changing the grid voltage, and the sensitivity to specific gas is enhanced or inhibited, so that the selectivity and difference of the electronic nose device to different gases are achieved. The electronic nose device isused for detecting and identifying low-concentration mixed gas, and has the technical advantages of high sensitivity, high reliability, strong anti-noise capability and the like.

Description

technical field [0001] The invention relates to the field of semiconductor gas sensitive sensors, in particular to an electronic nose device and a preparation method thereof. Background technique [0002] With the rapid development of the economy, industrial emissions lead to more and more serious air pollution, and air quality monitoring is becoming increasingly important; in the production process, it is often necessary to monitor the concentration of flammable, explosive or toxic gases in the air to ensure safe production; In the field of food, the quality and freshness of products can also be detected by gas sensors; in the field of biomedicine, the detection of trace amounts of volatile organic gases (VOCs) in human breath can be used to assist medical diagnosis. However, a single-component gas sensor is difficult to meet the requirements of such applications. In addition, especially with the development of the Internet of Things, more gas sensors will be needed in all...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/00G01N27/12B82Y15/00
CPCB82Y15/00G01N27/00G01N27/127
Inventor 刘卫华吴海洋卜祥瑞李昕王小力
Owner XI AN JIAOTONG UNIV
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