System for treating dust-containing tail gas

Abstract

The invention discloses a system for treating dust-containing tail gas; the system comprises a combustion-dust removal-dust collection device, which comprises a combustion section, which is provided with a dust-containing tail gas inlet, a combustion support gas inlet, and a heat source; a dust removal section, which is connected with the combustion section and provided with an annular pipe, wherein a plurality of holes facing the inner wall of the dust removal section are evenly distributed in the circumferential direction of the annular pipe; a dust collection section, which is connected with the dust removal section and provided with filler, a liquid atomizer and a dust-collected gas outlet, wherein the liquid atomizer is located above the filler, and the dust-collected gas outlet is located above the liquid atomizer; a slurry outlet which is connected with the dust removal section and the dust collection section; a pH regulating device, which is provided with a slurry inlet, a slurry outlet after slurry mixing, a pH regulator inlet and a pH detector, and the slurry outlet extends below the liquid level of the pH regulating device; a liquid-solid separation device, which is provided with a filter element, a mixed slurry inlet, a slag slurry outlet and a filtered liquid outlet, and the filtered liquid outlet is connected with the ring pipe and the liquid atomizer; and a gaspurification device, which is provided with an adsorption layer, a dust-collected gas inlet and a purified gas outlet.

Description

technical field [0001] The invention belongs to the technical field of tail gas treatment, in particular, the invention relates to a system for treating dust-laden tail gas. Background technique [0002] In the manufacturing process of integrated circuits and LED panels, a variety of silicon-containing substances are used in chemical vapor deposition, such as trichlorosilane, dichlorodihydrosilane, silane, disilane, ethyl orthosilicate, octamethyl Cyclotetrasiloxane, polysilazane, tetramethylsilane, trimethylsilane, etc.; in the manufacturing process of optical fiber preform, the main raw material used in vapor deposition is silicon tetrachloride. After these gases participate in the reaction, the Exhaust gas is discharged in the form of tail gas, and at the same time, the above-mentioned gas will also generate tail gas during the filling and replacement process. The above-mentioned poisonous and harmful gases used as process raw materials or reaction by-products, some of w...

AI Technical Summary

Problems solved by technology

There are two problems with this solution. One is that the mechanical seal of the transmission part is easy to leak, especially when dealing with flammable and explosive gases such as silane, which is extremely dangerous. The other is that the scraper itself will also deposit silica particles, and the system needs to be shut down for maintenance. Clean up, affecting the operation of the production system

[0006] When washing with water, if the washing water is unevenly distributed, there may be liquid dead zones in some areas, resulting in poor dust collection effect, and fine particles are discharged into the atmosphere, causing environmental pollution; at the same time, the capture of hydrogen chloride in the tail gas will Acidic wastewater is produced, and discharge without effective treatment will cause environmental pollution, and the use of neutral circulating water has poor washing effect and large consumption

In order to reduce operating costs, there is a plan to recycle the rinsing water, but the rinsing water contains a large amount of solid silica, and the particles are extremely small, at the micron level, and it is not easy to filter through a simple filter, making the fine particles Silica enters sprinkler system, causing blockage

At the same time, the rinsing water is acidic wastewater, which is corrosive, and has certain requirements for the filter material

The solid particles accumulated in the drained rinse water are not separated, which is likely to cause blockage of subsequent pipelines and facilities

[0007] After the exhaust gas is combusted, when the bag dust collection method is used for dust collection, the cost of replacing the bag is high. When the water content or oil content in the exhaust gas is high, it is easy to paste the bag, which eventually causes the system to fail to operate normally. The gas has not been effectively treated, causing environmental pollution

And when multiple bags are arranged, if a single bag is broken, it will take a long time to determine the location of the broken bag

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