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Corrosion-resistant protective thin film, and preparation method and application thereof

A protective film, corrosion-resistant technology, applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of weak bonding force, instability, increased process complexity, etc. The effect of strong interfacial adhesion

Active Publication Date: 2020-07-24
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The preparation of this type of film by vapor deposition requires the introduction and regulation of oxygen pressure. The gas composition and pressure ratio in the film deposition vacuum chamber will significantly affect the chemical composition and structure of this type of film, so its process stability is difficult to guarantee.
On the other hand, the bonding force between vapor deposition of the highest valence oxide film of vanadium group elements and metal substrate materials commonly used in engineering is generally weak. For example, the multilayer structure design of metal film layer transition can improve the bonding of film and metal substrate to a certain extent. performance, but increases process complexity
Moreover, the interlayer bonding performance of the metal transition layer and the oxide film layer will also affect the overall corrosion protection performance of the film material.
Precursors and inorganic salts, such as niobium alkoxides, needed to prepare thin films of the highest valence oxides of vanadium group elements by the sol-gel method are very unstable, which significantly increases the complexity of the control of the preparation process parameters
Due to the defects in the above method, the corrosion resistance of the vanadium group oxide film prepared by the above method is not good.

Method used

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  • Corrosion-resistant protective thin film, and preparation method and application thereof
  • Corrosion-resistant protective thin film, and preparation method and application thereof
  • Corrosion-resistant protective thin film, and preparation method and application thereof

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preparation example Construction

[0028] The invention provides a method for preparing a corrosion-resistant protective film, comprising the following steps:

[0029] (1) metal M is deposited on the surface of the substrate by ion plating, and a metal film is formed on the surface of the substrate; the M is V, Nb or Ta;

[0030] (2) irradiating the metal film with an atomic oxygen beam to form a corrosion-resistant protective film in situ on the surface of the substrate; the energy of the atomic oxygen beam is 4-10 eV, and the irradiation time is 60-180 min.

[0031] The invention adopts ion plating method to deposit metal M on the surface of the substrate, and forms a metal film on the surface of the substrate; the M is metal vanadium, niobium or tantalum.

[0032]In the present invention, the substrate is preferably pretreated before depositing the metal M. In the present invention, the base is preferably a metal base, excluding aluminum alloys and magnesium alloys, and specifically can be commonly used met...

Embodiment 1

[0044] The instruments used include: ABS-1200 type multi-arc combined with unbalanced magnetron sputtering coating device; Simul-LEO-T450 type space atomic oxygen effect ground simulation test device; the base material is 9Cr18 steel, and its geometric dimensions are:

[0045] Prepare a corrosion-resistant protective film on the surface of the 9Cr18 steel matrix material, including the following process steps:

[0046] (1) Surface polishing and cleaning of substrate materials

[0047] Use water sandpaper to grind and polish the surface of the base material, so that the surface roughness of the base material to be coated is better than 0.05 μm; then, use acetone, petroleum ether and absolute ethanol to ultrasonically clean the surface of the base material; finally rinse with deionized water Dry quickly with nitrogen.

[0048] (2) Substrate material installation and argon ion sputtering cleaning

[0049] Put the base material sample cleaned in the previous step into the ABS-...

Embodiment 2

[0055] The preparation of the highest valence oxide corrosion protection film of vanadium group elements on the surface of 9Cr18 steel matrix material includes the following process steps:

[0056] (1) Surface polishing and cleaning of substrate materials

[0057] Use water sandpaper to grind and polish the surface of the base material, so that the surface roughness of the base material to be coated is better than 0.05 μm; then, use acetone, petroleum ether and absolute ethanol to ultrasonically clean the surface of the base material; finally rinse with deionized water Dry quickly with nitrogen.

[0058] (2) Substrate material installation and argon ion sputtering cleaning

[0059] Put the substrate material sample cleaned in the previous step into the ABS-1200 multi-arc combined unbalanced magnetron sputtering coating device, so that the distance between the center of the substrate material and the center of the Ta target surface is kept at 250mm. In the film preparation st...

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Abstract

The invention provides a corrosion-resistant protective thin film, and a preparation method and application thereof, and belongs to the field of protective materials. The corrosion-resistant protective thin film provided by the invention is of a multilayer structure which includes a metal M layer, a metal M and M2O5 mixed transition layer and an M2O5 layer in sequence from the surface of a matrixand the thin film, wherein M is V, Nb or Ta. The preparation method for the corrosion-resistant protective thin film comprises the following steps of: depositing the metal M on the surface of the matrix by an ion plating method, and forming a metal thin film on the surface of the matrix, wherein M is metal vanadium, niobium or tantalum; and adopting an atomic oxygen beam to irradiate the metal thin film, and realizing the in situ formation of the corrosion-resistant protective thin film on the surface of the matrix, wherein the energy of the atomic oxygen beam is 4-10 eV, and irradiation timeis 60-180 min. The preparation method provided by the invention is simple and is easy to operate, and the prepared protective thin film can effectively improve the corrosion resistance of the matrix.

Description

technical field [0001] The invention relates to the field of film materials, in particular to a corrosion-resistant protective film and its preparation method and application. Background technique [0002] Vanadium (V), niobium (Nb) and tantalum (Ta) are generally referred to as vanadium group elements. The highest valence oxides of vanadium group elements generally have excellent thermodynamic stability and corrosion resistance, which makes the highest valence oxides of vanadium group elements have broad application prospects in corrosion-resistant protective film materials. [0003] At present, the preparation methods of the highest valence oxide protective film of vanadium group mainly include physical vapor deposition, chemical vapor deposition and sol-gel method. Among them, physical vapor deposition methods mainly include electron beam evaporation and reactive sputtering. The preparation of this type of film by vapor deposition requires the introduction and regulatio...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/16C23C14/58C23C14/02C23C14/54
CPCC23C14/022C23C14/16C23C14/32C23C14/542C23C14/5853
Inventor 胡明伏彦龙王德生姜栋王琴琴杨军孙嘉奕翁立军
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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