ZnMgO ultraviolet detector and preparation method thereof
A UV detector and thin-film technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor device manufacturing, final product manufacturing, etc., can solve the problems of large dark current of UV detectors, low crystal quality, fast light response speed, etc. Phase separation, high crystal quality, and reduced oxygen defects
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[0052] The preparation method of ZnMgO thin film 2 is: utilize metal organic compound chemical vapor deposition (MOCVD) equipment, with organozinc compound as zinc source, organomagnesium compound as magnesium source, in excess oxygen atmosphere, heating substrate to certain temperature, on the substrate ZnMgO thin films with hexagonal phase and cubic phase mixed phase structure were grown on the substrate.
[0053] The preparation method of the interdigitated electrode 3 is as follows: use negative photolithography to form an interdigitated electrode mask on the ZnMgO film, use a small coating machine to sputter metal on the interdigitated electrode mask, and then remove the interdigitated electrode mask by means of ultrasound or the like. film, forming interdigitated electrodes.
[0054] The above content has described in detail the structure of the ZnMgO ultraviolet detector provided by the present invention. Corresponding to the above-mentioned ZnMgO ultraviolet detector, t...
Embodiment 1
[0076] Put the cleaned sapphire substrate into the growth chamber of the MOCVD equipment, adjust the growth temperature to 800°C, and the pressure to 4000Pa. Use dimethyl zinc as the zinc source, dimethylmagnesocene as the magnesium source, the carrier gas flow rate of the zinc source is 10 sccm, the carrier gas flow rate of the magnesium source is 5 sccm, and the flow rate of high-purity oxygen is 500 sccm, which is much larger than the zinc source, The flow rate of the magnesium source was used to grow for 1 hour, the organic source and oxygen were turned off, and the substrate temperature was lowered to room temperature at 0.6°C / s to obtain a ZnMgO thin film.
[0077] Move the ZnMgO film into the annealing furnace, use an oxygen atmosphere, the oxygen flow rate is 12sccm, and raise the temperature of the annealing furnace to 700°C at a heating rate of 0.4°C / s. After the temperature is kept constant for 30min, the ZnMgO film is taken out from the annealing furnace.
[0078] ...
Embodiment 2
[0085] Put the cleaned sapphire substrate into the growth chamber of the MOCVD equipment, adjust the growth temperature to 500°C, and the pressure to 3000Pa. Use triethylzinc as the zinc source, dimethylmagnesocene as the magnesium source, the carrier gas flow rate of the zinc source is 40sccm, the carrier gas flow rate of the magnesium source is 20sccm, and the flow rate of high-purity oxygen is 500sccm, far greater than the zinc source, The flow rate of the magnesium source was used to grow for 1.2h, the organic source and oxygen were turned off, and the substrate temperature was lowered to room temperature at 0.4°C / s to obtain a ZnMgO thin film.
[0086] Move the ZnMgO film into the annealing furnace, use an oxygen atmosphere, and the oxygen flow rate is 12 sccm, raise the furnace temperature of the annealing furnace to 550 ° C at a heating rate of 0.2 ° C / s, and keep the temperature for 60 minutes, then take out the ZnMgO film from the annealing furnace.
[0087] On the ...
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