The invention provides a ZnMgO
ultraviolet detector and a preparation method thereof, and the method comprises the steps: S1, taking an organic
zinc compound as a
zinc source, taking an organic
magnesium compound as a
magnesium source, taking high-purity
oxygen as an
oxygen source, and growing a ZnMgO film on the surface of a substrate by adopting a
metal organic compound chemical vapor depositionmethod; S2, forming an interdigital
electrode mask on the ZnMgO film by using negative
photoresist photoetching, and removing the interdigital
electrode mask after
sputtering metal on the interdigital
electrode mask to form an interdigital electrode; and S3, pressing In particles on the interdigital electrode to obtain the ZnMgO
ultraviolet detector with the MSM structure. Compared with the priorart, the
oxygen flow is increased, the oxygen
partial pressure is increased, and oxygen defects are reduced; the prepared ZnMgO film has the characteristics of high
crystallization quality, no phasesplitting, steep absorption
cut-off edge and the like, and the ZnMgO film 2 with the mixed-phase structure can simultaneously meet high
responsivity and low
dark current, so that the ZnMgO ultravioletphotoelectric
detector has lower
dark current and higher photoresponse speed.