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High-selectivity bulk acoustic wave resonance hydrogen sensor and preparation method thereof

A bulk acoustic wave resonator, high selectivity technology, applied in the use of sound waves/ultrasonic waves/infrasonic waves to analyze fluids, use sound waves/ultrasonic waves/infrasonic waves for material analysis, instruments, etc. It can solve the problems of poor hydrogen selectivity, high temperature requirements, slow response, etc. problems, to achieve the effect of easy access, improved accuracy, and fast response

Inactive Publication Date: 2021-01-15
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
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Problems solved by technology

[0005] In view of the above defects or improvement needs of the prior art, the present invention provides a high-selectivity bulk acoustic resonance hydrogen sensor and its preparation method, which is provided with a hydrogen selective layer, which overcomes the hydrogen sensor of the same type when detecting hydrogen. The shortcoming of gas sensitivity realizes the selective adsorption of hydrogen and improves the accuracy of detection, and the hydrogen sensor has a simple structure, strong selectivity for hydrogen detection, high sensitivity, fast response, and is compatible with integrated circuit technology , can realize miniaturization and productization, and can be applied to the highly sensitive detection of hydrogen in complex atmosphere environments, solving the problems of poor hydrogen selectivity, high temperature requirement, and slow response in the prior art

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  • High-selectivity bulk acoustic wave resonance hydrogen sensor and preparation method thereof
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  • High-selectivity bulk acoustic wave resonance hydrogen sensor and preparation method thereof

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preparation example Construction

[0040] see figure 2 , image 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 , the present invention also provides a method for preparing a highly selective bulk acoustic resonance hydrogen sensor, the preparation method mainly comprising the following steps:

[0041] Step 1, preparing a bulk acoustic wave resonator, specifically includes the following sub-steps:

[0042] (11) A substrate is provided, and a cavity structure is prepared on the substrate.

[0043] (12) Prepare the lower electrode bottom layer on the substrate.

[0044] (13) Prepare a piezoelectric layer on the sample obtained in step (12).

[0045] (14) Prepare the lead post of the lower electrode layer and the top layer of the lower electrode on the piezoelectric layer, thereby obtaining the lower electrode layer.

[0046] (15) An upper electrode layer is prepared on the piezoelectric layer, thereby obtaining a bulk acoustic wave resonator.

[0047] Step 2, ...

Embodiment 1

[0052] The preparation method of the selective acoustic wave resonance hydrogen sensor provided in Embodiment 1 of the present invention mainly includes the following steps:

[0053] (1) Choose a suitable size, single-side polished, 300nm thick silicon wafer as the substrate, clean the surface of the substrate according to the RCA cleaning process, spin-coat NR7 photoresist on the surface of the substrate, and apply it on the substrate by photolithography Obtain the cavity structure pattern, wash away the photoresist inside the pattern, to form cavity structure pattern grooves on the surface photoresist;

[0054] (2) Etching the surface of the above-mentioned sample by reactive ion etching, forming a groove with a cavity pattern structure on the substrate, the depth of which is 400nm;

[0055] (3) Place the above sample in acetone and soak for 15min to remove the surface photoresist;

[0056] (4) Coating a layer of SiO on the surface of the above sample by electron beam evapo...

Embodiment 2

[0076] The preparation method of the high-selectivity bulk acoustic resonance hydrogen sensor provided in Example 2 of the present invention is basically the same as the preparation method of the high-selectivity bulk acoustic resonance hydrogen sensor provided in Example 1 of the present invention, so in the preparation steps of Example 2, only The processes, methods and parameters, etc. that are different from those in the preparation steps of Example 1 are mentioned, and those that are not given are the same as those in Example 1 by default. The different processes are specifically:

[0077] Step (7) Depositing a layer of Al thin film on the surface of the sample by electron beam evaporation coating process, the thickness of the Al thin film is 100nm;

[0078] Step (10) using a magnetron sputtering coating process using a high-purity aluminum nitride target and introducing high-purity Ar 2 Carry out sputtering, laminate a layer of AlN thin film on the sample surface, the t...

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Abstract

The invention belongs to the related technical field of micro-nano manufacturing and discloses a high-selectivity bulk acoustic wave resonance hydrogen sensor and a preparation method thereof. The hydrogen sensor comprises a hydrogen sensitive layer, a hydrogen selection layer and a bulk acoustic wave resonator, wherein the hydrogen sensitive layer is arranged on the bulk acoustic wave resonator,and the hydrogen selection layer is arranged on the hydrogen sensitive layer; the hydrogen selection layer is arranged on the bulk acoustic wave resonator, an accommodating space is formed between thehydrogen selection layer and the bulk acoustic wave resonator, and the hydrogen sensitive layer is accommodated in the accommodating space; the hydrogen selection layer is one or more layers of filmsonly allowing hydrogen molecules to pass through. The hydrogen sensor is advantaged in that the hydrogen sensor realizes selective absorption of hydrogen, improves the detection accuracy, has the advantages of simple structure, strong hydrogen detection selectivity, high sensitivity and fast response, can be compatible with an integrated circuit process, can realize miniaturization and productization, and can be applied to high-sensitivity detection of hydrogen in a complex atmosphere environment.

Description

technical field [0001] The invention belongs to the technical field related to micro-nano manufacturing, and more specifically relates to a high-selectivity bulk acoustic resonance hydrogen sensor and a preparation method thereof. Background technique [0002] As an emerging energy carrier and chemical raw material, hydrogen has a series of advantages such as wide sources, clean and environmentally friendly, and recyclable. Explosion, its air content in the range of 4% to 75% is very easy to explode. Typical hydrogen sensing technologies include catalytic, thermal conductivity, electrochemical, resistive, and optical methods. These sensors usually have slow response speed, high operating temperature, and low sensitivity, which cannot meet the rapid and high-sensitivity detection requirements in the use of hydrogen. [0003] The micromass sensor is a hot application of bulk acoustic wave resonators. Its sensing principle is that the frequency of the resonator will change wit...

Claims

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Application Information

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IPC IPC(8): G01N29/036C23C14/30C23C14/10C23C14/02C23C14/58C23C14/35C23C14/16C23C14/06C23C28/00C23C16/56
CPCC23C14/0036C23C14/022C23C14/0617C23C14/10C23C14/165C23C14/30C23C14/35C23C14/58C23C14/5806C23C14/5873C23C16/303C23C16/56C23C28/322C23C28/34G01N29/036
Inventor 孙博何春华廖广兰王子奕林建斌
Owner HUAZHONG UNIV OF SCI & TECH
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