Laser cutting protection liquid as well as preparation method and application thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 深圳市化讯半导体材料有限公司
- Publication Date
- 2021-06-04
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Abstract
Description
technical field
[0001] The invention relates to the technical field of laser cutting, in particular to a laser cutting protective liquid and its preparation method and application. Background technique
[0002] With the continuous expansion of the high-brightness LED market, the demand for improving production efficiency and product yield is rising. Therefore, laser ablation processing and invisible cutting methods have gradually become mainstream processes in high-brightness LED processing. Among them, laser ablation processing takes into account the balance of efficiency, pass rate and cost. Moreover, as the feature size of semiconductor integrated circuits continues to shrink, if a wafer with a low dielectric constant film (Low-k film) is cut by a traditional knife wheel, due to the brittleness of the Low-k material, there will be the following problems: scratches, Defects, etc., or the insulating film formed on the surface of the chip as a circuit element is peeled off....