The invention relates to a fluorine-containing polyimide humidity-sensitive capacitor and a preparation method thereof. The humidity-sensitive capacitor is composed of a substrate, a lower electrode, a fluorine-containing moisture-sensitive polyimide coating and an upper electrode; wherein, the fluorine-containing Moisture-sensitive polyimide is formed by reacting 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, aromatic diamine and aromatic dianhydride. The preparation method includes: cleaning the substrate with a cleaning solution, putting it in a drying oven to dry, drying, and then vacuum evaporation to make the lower electrode, JP-6 conductive adhesive to guide the lead wire of the lower electrode, and then spin-coating fluorine-containing moisture-sensitive polyimide Amine precursor solution, imidization, vacuum evaporation to make the upper electrode, sectioning, rinsing with deionized water, drying, screening, surface modification, JP‑6 conductive glue lead the upper electrode lead, and prepare the fluorine-containing polyimide moisture sensitive capacitance. The invention has the advantages of high sensitivity, small hysteresis, simple manufacturing process, low cost, etc., and has good market prospects.