Zinc-gallium-aluminum ternary oxide rotary ceramic target and preparation method thereof

A ceramic target, aluminum ternary technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of continuous sputtering process, reduced production efficiency, deterioration of film performance, etc. Low, high yield, high density effect

Active Publication Date: 2014-04-02
宁夏中色新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the coating process, the so-called target "poisoning" phenomenon often occurs, that is, abnormal discharge and target surface granulation (re-deposition), resulting in discontinuity of the sputtering process, deterioration of film performance, and reduced production efficiency

Method used

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Examples

Experimental program
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Effect test

preparation example Construction

[0022] The preparation method of the present invention is completed according to the following steps:

[0023] 1. According to the composition, gallium oxide, aluminum oxide, zinc oxide, and tungsten oxide powders with purity ≥ 99.95% and appropriate specific surface area are dry-mixed in proportion, and then calcined at 600-1000 ° C for 2-10 hours. The calcined powder is dispersed by wet ball milling with deionized water or absolute ethanol until the specific surface area of ​​the powder is 3-10m 2 / g, the slurry is atomized and granulated.

[0024] 2. Cold isostatic pressing: put the atomized and granulated powder in the above step 1 into a rubber mold, hold the pressure at 240-320MPa for 5-20min to make a hollow tubular green body, and the relative density of the formed green body is 65-75 %.

[0025] 3. In order to control the crystal phase structure, compactness, bulk resistivity, deformation and other characteristics of the target sintered body, the following sintering...

Embodiment 1

[0029] Use oxide powder with purity ≥99.95%. Weigh the specific surface area of ​​6.8m 2 / g zinc oxide powder 9600g; specific surface area 13.5m 2 / gγ-Al 2 o 3 Powder 150g; specific surface area 5.6m 2 / gβ-Ga 2 o 3 Powder 250g; specific surface area 3m 2 / g WO 3 Powder 5g. After dry mixing for 4 hrs, it was calcined at 800° C. for 4 hrs. The calcined powder is dispersed by wet ball milling with deionized water or absolute ethanol as the grinding medium until the specific surface area of ​​the powder is 6-7m 2 / g, the slurry is atomized and granulated. Put the atomized and granulated powder into a rubber mold, hold the pressure at 280MPa for 10 minutes, and form it into a hollow tubular green body with a relative density of 67%.

[0030] The molded green body uses oxygen as the sintering atmosphere, Under the conditions of 0.2MPa and oxygen flow rate of 100L / min. The sintering process is room temperature-900°C, heating rate 5°C / min; 900-1200°C, heating rate 2°C / mi...

Embodiment 2

[0034] Use oxide powder with purity ≥99.95%. Weigh the specific surface area of ​​5.3m 2 / g zinc oxide powder 9540g; specific surface area 12m 2 / gγ-Al 2 o 3 Powder 200g; specific surface area 6.6m 2 / gβ-Ga 2 o 3 Powder 260g; specific surface area 2m 2 / g WO 3 Powder 3g. After dry mixing for 5 hrs, it was calcined at 950°C for 4 hrs. The calcined powder is dispersed by wet ball milling with deionized water or absolute ethanol as the grinding medium until the specific surface area of ​​the powder is 7-8m 2 / g, the slurry is atomized and granulated. Put the atomized and granulated powder into a rubber mold, hold the pressure at 320MPa for 10 minutes, and form it into a hollow tubular green body with a relative density of 72%.

[0035] The molded green body uses oxygen as the sintering atmosphere, Under the conditions of 0.1MPa and oxygen flow rate of 30L / min. The sintering process is room temperature-900°C, heating rate 7°C / min; 900-1250°C, heating rate 3°C / min; 125...

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Abstract

The invention relates to a zinc-gallium-aluminum ternary oxide (hollow tubular shape) rotary ceramic target and a preparation method thereof. The rotary ceramic target is characterized by comprising the following raw materials in percentage by mass: 0.5-3.5% of gallium oxide, 0.5-2.5% of aluminum oxide, 0.002-0.05% of tungsten oxide and the balance of zinc oxide. According to the preparation method, the zinc oxide, gallium oxide, aluminum oxide and trace tungsten oxide are used as raw materials, and the components are uniformly distributed in a matrix by virtue of the dry mixing, roasting and wet ball milling dispersion treatment processes; and the ternary oxide mixed powder has good dispersity and sintering activity. The rotary ceramic target has high density and high yield, the process equipment is simple, the cost is relatively low, and industrialization is easy to realize. The target has high density, low poisoning rate, visible light (400-700nm) transmittance (more than or equal to 90%) and near-infrared region (700-1,400nm) transmittance ( more than or equal to 85%), and is suitable for DC-magnetron sputtering large-area film photovoltaic cell coating.

Description

technical field [0001] The invention relates to a zinc-gallium-aluminum ternary oxide (hollow tubular) rotating ceramic target and a preparation method thereof. Background technique [0002] ZnO is a wide energy gap multifunctional semiconductor material, which has excellent properties such as gas sensitivity, pressure sensitivity, piezoelectricity, transparent conductivity, photoelectricity, and easy integration of various semiconductor materials. It has important applications in the fields of display devices, nonlinear optics, light emitting devices, surface acoustic wave devices, solar cells, thermal radiation mirrors and other ultraviolet light detectors and integrated optics. ZnO-based thin films have become an important material for TCO (transparent conductive oxide) thin films due to their outstanding advantages such as diverse properties, wide application and low price, as well as various preparation methods, relatively simple processes, and easy doping and modificat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/08C04B35/453C04B35/622
Inventor 刘秉宁刘孝宁张红梅杨小林征卫星韩建华宋强胡强楠方熙成刘伟王应旺刘东平
Owner 宁夏中色新材料有限公司
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