A kind of composite treatment method of coating first and then nitriding on the surface of metal material
A metal material and composite treatment technology, which is applied in the direction of metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problem of low hardness, reducing the bonding strength of the film base of the composite treatment layer, and affecting the friction and wear of the composite treatment layer Performance and service life and other issues, to achieve the effect of reducing defect density, film-base bonding strength and film compactness, and ensuring the film-base bonding strength
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Embodiment 1
[0037] (1) Workpiece pre-treatment: The workpiece is made of high-speed steel (grade W18Cr4V), the size of the workpiece is 20mm×10mm×10mm, and the size of the treated surface is 20mm×10mm. After degreasing, anhydrous alcohol ultrasonic cleaning and drying, the workpiece to be treated is placed on the sample stage in the ion nitriding / arc ion plating composite treatment equipment;
[0038] (2) Vacuuming and workpiece preheating: start the vacuuming system of the composite processing equipment, and wait until the vacuum degree of the vacuum chamber reaches 5×10 -3 At Pa, turn on the heater to heat the workpiece in the vacuum chamber to 400°C;
[0039] (3) Glow (or / and arc) cleaning: Introduce argon gas into the vacuum chamber, control the air pressure at 2.0Pa, turn on the bias power supply, and control the bias voltage at -800V, so that the gas will glow discharge, and the surface of the workpiece will be cleaned. Glow cleaning for 20 minutes; then adjust the argon gas pressu...
Embodiment 2
[0045] (1) Workpiece pre-treatment: The workpiece is made of high-speed steel (grade W6Mo5Cr4V2Al), the size of the workpiece is 20mm×10mm×10mm, and the size of the treated surface is 20mm×10mm. After degreasing, anhydrous alcohol ultrasonic cleaning and drying, the workpiece to be treated is placed on the sample stage in the ion nitriding / arc ion plating composite treatment equipment;
[0046] (2) Vacuuming and workpiece preheating: start the vacuuming system of the composite processing equipment, and wait until the vacuum degree of the vacuum chamber reaches 6×10 -3 At Pa, turn on the heater to heat the workpiece in the vacuum chamber to 430°C;
[0047] (3) Glow (or / and arc) cleaning: Introduce argon gas into the vacuum chamber, control the air pressure at 1.5Pa, turn on the bias power supply, and control the bias voltage at -750V, so that the gas will glow discharge, and the surface of the workpiece will be cleaned. Glow cleaning for 20 minutes; then adjust the argon gas p...
Embodiment 3
[0053] (1) Workpiece pretreatment: The workpiece is made of austenitic stainless steel (grade 0Cr19Ni9), the size of the workpiece is Φ30mm×10mm, and the size of the treated surface is Φ30mm×10mm. After degreasing, anhydrous alcohol ultrasonic cleaning and drying, the workpiece to be treated is placed on the sample stage in the ion nitriding / magnetron sputtering composite processing equipment;
[0054] (2) Vacuuming and workpiece preheating: start the vacuuming system of the composite processing equipment, and wait until the vacuum degree of the vacuum chamber reaches 5×10 -3 At Pa, turn on the heater to heat the workpiece in the vacuum chamber to 400°C;
[0055] (3) Glow cleaning: Introduce argon gas into the vacuum chamber, control the air pressure at 2.0Pa, turn on the bias power supply, and control the bias voltage at -800V to make the gas glow discharge, and perform glow cleaning on the surface of the workpiece for 20 minutes;
[0056] (4) Deposit thin film transition la...
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