Novel aluminum nitride microsphere powder preparation method

Abstract

The present invention discloses aluminum nitride microsphere powder, which has a diameter of 20 nm-10 [mu]m. According to the preparation method, a metal inorganic salt is adopted as a precursor and a sol-gel method and a gas nitriding reducing method are combined to prepare the aluminum nitride microsphere powder at the low heat treatment temperature. According to the present invention, the method has characteristics of simple preparation process, simple operation, short preparation process period, low heat treatment temperature, substantial energy consumption reducing, low raw material cost and low equipment cost, and is suitable for industrial mass production; and the prepared ALN microspheres have characteristics of regular shape, adjustable particle size, uniform size distribution, good crystallinity, high purity and the like, can be used for producing circuit packaging materials, ultraviolet photoelectric detectors, pressure sensors, thermal radiation sensors, field effect transistors, light emitting diodes, transparent ceramics, nitride phosphor and the like, and is further the material with the excellent performances such as high temperature resistance, corrosion resistance and anti-oxidation property.

Description

technical field [0001] The invention relates to an aluminum nitride microsphere powder suitable for circuit packaging, sensors, semiconductor lighting, ceramic processing, anti-corrosion and wear-resistant technical fields and a preparation method thereof. Background technique [0002] Aluminum nitride (AlN) has excellent physical and chemical properties such as high thermal conductivity, high electrical insulation, high strength, high hardness, low thermal expansion coefficient, etc., and has excellent process properties such as easy processing, and has become the most promising new A generation of high thermal conductivity ceramic electronic substrates and packaging materials. AlN ceramic materials also have excellent optical properties and sound wave propagation properties, and can be used as the main material for optoelectronic components. As a high-performance dielectric ceramic, the thermal conductivity of AlN ceramics is slightly lower than that of SiC and BeO cerami...

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Problems solved by technology

Among them, the direct nitriding method of aluminum powder has low cost and simple process, but the product is incomplete nitriding and easy to agglomerate, and it is difficult to synthesize high-purity and fine-grained products; the synthetic product of alumina carbothermal reduction method has high purity and uniform particle size, but the reaction The temperature is high, the holding time is long, and carbon removal is required in the later stage; the self-propagating high-temperature synthesis method has a fast reaction speed, energy saving and environmental protection, and high activity of the product, but the reaction is difficult to control, the purity is not high, and the product is easy to agglomerate; the chemical vapor deposition method has a high purity product 1. The particle shape is good, but the cost of raw materials is high, the equipment requirements are high, and it is not suitable for industrial production; the product synthesized by plasma method has fine particle size, large specific surface area, high purity, and high activity, but the equipment is expensive and complicated, high energy consumption, and it is not suitable for industrial production; The traditional sol-gel method has a simple process, high purity of synthetic products, and uniform particle distribution, but the raw materials are commonly used organic aluminum salts, and the cost is relatively high

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