Method for preparing equiaxed alpha-phase silicon nitride powder
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- 浙江英德赛半导体材料股份有限公司
- Publication Date
- 2019-04-12
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Abstract
Description
technical field
[0001] The invention relates to a method for preparing equiaxed α-phase silicon nitride powder, which belongs to the field of inorganic non-metallic materials. Background technique
[0002] Silicon nitride ceramics have the characteristics of high temperature resistance, good chemical stability, high mechanical strength, and self-lubrication. They are widely used in cutting ball bearings and other wear-resistant parts, high-temperature ceramic bearings, and high-temperature resistant parts for automobile engines. Compared with aluminum nitride ceramics and alumina ceramics, high thermal conductivity silicon nitride ceramics have both high thermal conductivity and high mechanical strength. In addition, during the demoulding process of polysilicon, the α-phase silicon nitride powder does not react with molten silicon, which is suitable for the requirements of crucible coating in the process of purifying polysilicon. High-quality silicon nitride raw material po...