Cuprous oxide-based photocathode with enhanced nitrogen-doped back surface electric field
A technology of cuprous oxide and electric field enhancement, applied in the direction of electrodes, electrolytic processes, electrolytic components, etc., can solve the problem of deteriorating cuprous oxide-based photocathode performance, large work function of p-type cuprous oxide, and low minority carrier mobility of cuprous oxide and other issues to achieve the effect of reducing device cost, speeding up delivery, and improving performance
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[0030] 1) The conductive glass was ultrasonically cleaned in acetone, deionized water, and absolute ethanol for 15 minutes, dried with nitrogen, and then fixed on the magnetron sputtering substrate table. The metal copper target with a purity of 99.999% is used as the sputtering target;
[0031] 2) Close the chamber door and evacuate the chamber to 5.0×10 -4 Below Pa, set the sinking bottom heating temperature to 350°C;
[0032] 3) Introduce argon gas to pre-sputter the copper target, the sputtering power is 100W, and the time is 10min;
[0033] 4) Adjust the flow rate of argon, oxygen, and nitrogen to 60:10:8sccm, open the baffle of the sinking platform, and deposit nitrogen-doped cuprous oxide on the conductive glass. The deposition time is 3 minutes, and the baffle is closed after 3 minutes;
[0034] 5) Turn off the sputtering system, turn off the bottom heating system, stop feeding gas, turn off the vacuum system, and take out the sample after the bottom cools down to ro...
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