Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for processing ultra-smooth surface through photoelectric concerted catalysis coupling colloid jet flow

An ultra-smooth surface and synergistic catalysis technology, applied in chemical instruments and methods, metal processing equipment, manufacturing tools, etc., can solve the problems of low utilization rate, affecting photocatalytic effect, increasing cost and inconvenient use, etc. Achieve efficient removal, improve efficiency, and improve removal rate

Inactive Publication Date: 2020-07-17
LANZHOU UNIVERSITY OF TECHNOLOGY
View PDF17 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, on the one hand, the penetrating power of ultraviolet light is insufficient, and a large amount of ultraviolet light is blocked and consumed in the optical path transmission, and the utilization rate is not high; on the other hand, a large number of photogenerated electron-hole pairs induced by ultraviolet light The rapid recombination in the jet beam greatly affects the photocatalytic effect of the method; on the other hand, special ultraviolet protection is required for the operator during the processing of the method, which increases the cost and the inconvenience of use

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for processing ultra-smooth surface through photoelectric concerted catalysis coupling colloid jet flow

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0020] Doped and modified nano-titanium dioxide particles with visible light catalytic activity, deionized water, sodium tripolyphosphate acidity regulator and sodium pyrophosphate dispersant with a particle size of 5-20 nm are selected. The mass fraction of doped modified nano-titanium dioxide particles with visible light catalytic activity is 1.5%, the mass fraction of sodium tripolyphosphate is 0.1%, the mass fraction of sodium pyrophosphate is 0.2%, and the mass fraction of deionized water is 98.2%. . Dosing was carried out according to these ingredients, and ultrasonic wave was used to disperse for 30 minutes to obtain a colloidal polishing solution with a pH value of 6.

[0021] Add the prepared doped modified nano-titanium dioxide particle colloid with visible light catalytic activity into the polishing liquid container, start the booster pump and the motor unit, and close the hydraulic control switch to make the colloid pressure of the nano-particle colloid injection s...

specific Embodiment approach 2

[0025] Specific embodiment 2: The difference between this embodiment and the aforementioned specific embodiment 1 is that the photoelectric synergistic catalysis coupled colloidal jet flow processing method is as follows: when the jet pressure is 3 MPa, the pH value is 8, and the dynamic viscosity is 0.011 N·s / m 2 When the particle size is about 40nm, the core-shell structure nano-ferrite particle colloid with a mass fraction of 8% is pressurized, and the irradiation intensity is 120mW / cm 2 Under the visible light field, when the power supply voltage of the electrocatalytic component is DC 24V and the current is 30A, a photoelectric synergistic catalytic nozzle with a diameter of 0.5mm is used to generate a photoelectric synergistic catalytic coupling nanoparticle colloidal jet beam and spray it on a single crystal rotating at a speed of 60r / min. The surface of the silicon substrate is subjected to ultra-smooth surface polishing for 200 minutes.

specific Embodiment approach 3

[0026] Specific embodiment three: the difference between this embodiment and specific embodiment one is that the mass fraction of the doped modified nano-titanium dioxide particles with visible light catalytic activity used is 3.5%, and the acidity regulator is sodium bicarbonate, and its mass fraction is 0.15 %, the dispersant is sodium orthophosphate, and its mass fraction is 0.25%, and the mass fraction of deionized water is 96.1%, and the others are the same as in Embodiment 1.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
wavelengthaaaaaaaaaa
diameteraaaaaaaaaa
diameteraaaaaaaaaa
Login to View More

Abstract

The invention relates to a method for processing an ultra-smooth surface through a photoelectric concerted catalysis coupling colloid jet flow. A nanoparticle colloid jet system comprises a booster pump, a motor set, a flow control valve, a flow meter, a pressure meter, a hydraulic control switch and the like; a photocatalytic light path assembly comprises a visible light source, an optical fiberwith collimating mirrors at the two ends, a conductive glass lens, visible light triggered nanoparticle colloid and the like; an electro-catalysis assembly comprises a positive electrode, a negative electrode and an external power source; the conductive glass lens is connected with the positive electrode of the electro-catalysis assembly to form a positive electrode, and a metal copper plate electrode on a rotary workbench is connected with the negative electrode of the electro-catalysis assembly to form a negative electrode; the nanoparticle colloid jet system, the photocatalytic light path assembly and the electro-catalysis assembly are organically connected into a whole through a photoelectric concerted catalysis nozzle, and under the photoelectric concerted catalysis effect, nanoparticles in a colloid polishing solution and the surface of a workpiece are subjected to a sufficient interface reaction; and therefore, efficient nanoscale ultra-smooth surface polishing of surface materials of workpieces such as semiconductors, optical glass and metal is achieved.

Description

technical field [0001] The invention relates to a method for processing ultra-smooth surfaces by photoelectric synergistic catalysis coupling colloidal jets. Background technique [0002] In the fields of optical systems, nanocircuits, chemical and biological sensors, medical detection and diagnosis, and biological imaging, there is a huge application demand for ultra-smooth and non-damaging surface components, such as high-precision optical testing systems, soft X-ray optical systems, and high-energy laser systems. Optical components with extremely low surface roughness and high surface shape accuracy are required to ensure high reflectivity and low scattering characteristics; in VLSI, substrates with ultra-smooth and non-damaged surfaces can ensure smaller scale The characteristic line width; in micro-nano optical devices such as optical waveguides, microlenses and microlens arrays, by ensuring that micro-nano structures and devices have extremely precise characteristic ph...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B24C1/08B24C3/02B24C5/04B24C11/00B24C9/00B24C7/00B01J8/00B01J19/12B01J19/08
CPCB01J8/001B01J19/0006B01J19/08B01J19/12B24C1/08B24C3/02B24C5/04B24C7/0015B24C9/00B24C11/00
Inventor 宋孝宗王继波
Owner LANZHOU UNIVERSITY OF TECHNOLOGY