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Novel perovskite semiconductor type X-ray detector and preparation method thereof

A perovskite and semiconductor technology, applied in the field of X-ray detectors, can solve the problems of large dark current, signal annihilation, affecting the response speed of the detector, etc., and achieve the effect of improving performance and response speed.

Pending Publication Date: 2020-08-28
深圳市惠能材料科技研发中心(有限合伙)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, many perovskite materials have low resistivity, which leads to a huge dark current and annihilation of the signal. Moreover, the perovskite material itself will produce a strong ion migration phenomenon under the electric field, so that the dark current cannot be kept stable for a long time. These factors lead to Low or unstable signal-to-noise ratio
Thirdly, the upper and lower surfaces of perovskite materials often have a large number of surface defects, which will cause serious ion migration under the condition of an external electric field, resulting in the inability of the dark current to remain stable for a long time and affecting the response speed of the detector.
Finally, the perovskite material is in direct contact with the signal readout thin film transistor array and the top electrode of the detector, and it is easy to chemically react with the metal material of the signal readout thin film transistor array and the top electrode, resulting in a decrease in the performance of the perovskite light-absorbing layer and affecting detection. The stability of the performance of the detector, and the perovskite material itself is also easily affected by external conditions such as water and oxygen, and chemical reactions occur. These factors will affect the stability of the detector.

Method used

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  • Novel perovskite semiconductor type X-ray detector and preparation method thereof
  • Novel perovskite semiconductor type X-ray detector and preparation method thereof
  • Novel perovskite semiconductor type X-ray detector and preparation method thereof

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preparation example Construction

[0073]2. Preparation of Perovskite Semiconductor X-ray Detectors

[0074] Another aspect of the invention discloses a preparation method of the perovskite semiconductor X-ray detector of the invention. Briefly, see figure 1 , the preparation method of the present invention adopts the signal readout thin film transistor array of the existing semiconductor type X-ray detector, first prepares the second interface layer on it, then prepares the perovskite light-absorbing layer on the second interface layer, and then A first interface layer is prepared on the perovskite light-absorbing layer, and then a top electrode is prepared on the first interface layer to finally obtain the perovskite semiconductor X-ray detector of the present invention.

[0075] 1. Preparation of the second interface layer on the signal readout thin film transistor array

[0076] The present invention does not involve the innovation of the signal readout thin film transistor array, and the preparation meth...

Embodiment 1

[0103]The structure of the perovskite semiconductor type X-ray detector of the present embodiment can be found in figure 1 , including the following parts from bottom to top: top electrode 1; first interface layer 2; perovskite light absorbing layer 3; second interface layer 4; signal readout thin film transistor array 5. In this embodiment, the top electrode is made of indium tin oxide (ITO) material, and the perovskite light-absorbing layer is made of inorganic perovskite material CsPbI 3 , the first interface layer is made of inorganic material titanium oxide, and the second interface layer is also made of inorganic material titanium oxide. Choose commercially available 1cm 2 The signal is read out of the thin film transistor array, and the perovskite semiconductor X-ray detector is prepared on the basis of it.

[0104] Firstly, 10 g of tetrabutyl titanate (precursor of titanium oxide) was weighed, put into a beaker, and then 100 ml of chlorobenzene solvent was added, sti...

Embodiment 2

[0109] The structure of the perovskite semiconductor type X-ray detector of the present embodiment can be found in figure 1 , including the following parts from bottom to top: top electrode 1; first interface layer 2; perovskite light absorbing layer 3; second interface layer 4; signal readout thin film transistor array 5. In this embodiment, the top electrode is made of indium tin oxide (ITO) material, and the perovskite light-absorbing layer is made of inorganic perovskite material CsPbI 3 , the first interface layer is made of inorganic material titanium oxide, and the second interface layer is made of organic material polyimide. Select the same signal readout thin film transistor array as in Example 1, and prepare a perovskite semiconductor X-ray detector based on it. The second interface layer was prepared by preparing a polyimide precursor solution in a similar manner to Example 1. The polyimide precursor solution was prepared by weighing 10 g of polyamic acid (precurs...

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Abstract

The invention provides a perovskite semiconductor type X-ray detector, which comprises a top electrode, a perovskite light absorption layer and a signal reading thin film transistor array, and furthercomprises a first interface layer and a second interface layer, wherein the first interface layer is located between the top electrode and the perovskite light absorption layer, and the second interface layer is located between the perovskite light absorption layer and the signal reading thin film transistor array. The invention also provides a preparation method of the perovskite semiconductor type X-ray detector. According to the perovskite semiconductor type X-ray detector, the first interface layer and the second interface layer are arranged, so that effective contact and adhesion improvement between the perovskite light absorption layer and the top electrode and between the perovskite light absorption layer and the signal reading thin film transistor array are facilitated, the signal-to-noise ratio of the detector is improved, the response speed of the detector is improved, and long-term stability of the performance of the perovskite detector is guaranteed.

Description

technical field [0001] The invention belongs to the technical field of X-ray detectors, and in particular relates to a novel perovskite semiconductor X-ray detector and a preparation method thereof. Background technique [0002] An X-ray detector is a device that receives X-ray radiation and converts the X-ray energy into electrical signals that can be recorded. X-ray detectors have the characteristics of high spatial resolution and no detection damage, and can accurately detect the internal microstructure of samples such as organisms, minerals, and metals, and are widely used in medical treatment, security inspection, scientific research, nuclear industry, and military industry. and other fields. According to the electrical signal conversion method of X-ray detectors, it is generally divided into semiconductor-type direct detectors (directly converting X-rays into electrical signals) and scintillator-type indirect detectors (converting X-rays into optical signals and then ...

Claims

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Application Information

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IPC IPC(8): H01L27/146H01L27/30H01L51/44
CPCH01L27/1462H01L27/14658H01L27/14685H10K39/36H10K30/88Y02E10/549
Inventor 杨世和肖爽钱微
Owner 深圳市惠能材料科技研发中心(有限合伙)