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Boron molybdenum nitride/molybdenum sulfide nano composite coating and preparation method thereof

A nano-composite coating, molybdenum sulfide technology, applied in coating, metal material coating process, vacuum evaporation plating and other directions, to achieve the effect of simple process, easy implementation and easy content

Active Publication Date: 2020-11-03
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are no reports on the literature on Mo-B-S-C-N quinary coatings

Method used

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  • Boron molybdenum nitride/molybdenum sulfide nano composite coating and preparation method thereof
  • Boron molybdenum nitride/molybdenum sulfide nano composite coating and preparation method thereof
  • Boron molybdenum nitride/molybdenum sulfide nano composite coating and preparation method thereof

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preparation example Construction

[0032] The specific steps of the preparation method of the molybdenum boron nitride / molybdenum sulfide nanocomposite coating provided by the present invention are:

[0033] 1) Use metal (steel, cast iron or cemented carbide) or ceramic as the base, de-oil, de-oxidize, and dry with hot air, and then fix it on the rotatable work holder in the vacuum chamber;

[0034] 2) Combine high purity Mo and a certain amount of B 4 C and MoS 2 The composite target composed of target pieces is installed on the magnetron sputtering source; the metal Mo and (B 4 C and MoS 2 ) Area ratio is 10:1~7:3, where B 4 C and MoS 2 The area ratio is 5:1~1:5, the purity of Mo is 99.99%, B 4 C and MoS 2 The purity is 99.9%, and the distance between the composite target and the substrate is 80-120mm;

[0035] 3) Then the vacuum in the vacuum chamber is pumped to ≤5×10 -4 Pa, Ar with a flow rate of 20sccm, when the pressure of the vacuum chamber is 0.3Pa, pre-sputtering Mo / B 4 C composite target 5min, pre-sputtering...

Embodiment 1

[0041] 1) Put figure 1 Medium molybdenum target and 2 B 4 C and 2 MoS 2 Composed of composite target as magnetron sputtering source, where B 4 C and MoS 2 The area ratio to Mo is 1:1:8, and the distance between the composite target and the substrate is 10cm;

[0042] 2) Select high-speed steel as the base material, derust and polish its surface, and clean it with acetone, alcohol and deionized water in an ultrasonic cleaner for 10 minutes, then dry it with hot air and place it on the sample table in the vacuum chamber;

[0043] 3) The vacuum degree in the vacuum chamber is pumped to ≤5×10 -4 After Pa, apply a negative bias voltage of 800V to the substrate, and clean the surface of the substrate for 10 minutes with argon ion sputtering generated by glow discharge;

[0044] 4) Into 4sccm argon and 20sccm nitrogen, the flow ratio is 1:5, the working pressure is 0.8Pa, forming a mixed atmosphere, using magnetron sputtering technology to sputter Mo and (B 4 C and MoS 2 ) Composite target, ...

Embodiment 2

[0046] 1) Put figure 1 Medium molybdenum target and 2 B 4 C and 1 MoS 2 Composed of composite target as magnetron sputtering source, where B 4 C and MoS 2 The area ratio to Mo is 2:1:17, and the distance between the composite target and the substrate is 10cm;

[0047] 2) Select high-speed steel as the base material, derust and polish its surface, and clean it with acetone, alcohol and deionized water in an ultrasonic cleaner for 10 minutes, then dry it with hot air and place it on the sample table in the vacuum chamber;

[0048] 3) The vacuum degree in the vacuum chamber is pumped to ≤5×10 -4 After Pa, apply a negative bias voltage of 800V to the substrate, and clean the surface of the substrate for 10 minutes with argon ion sputtering generated by glow discharge;

[0049] 4) Into 4sccm argon and 20sccm nitrogen, the flow ratio is 1:5, the working pressure is 0.8Pa, forming a mixed atmosphere, using magnetron sputtering technology to sputter Mo and (B 4 C and MoS 2 ) Composite target....

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Abstract

The invention discloses a boron molybdenum nitride / molybdenum sulfide nano composite coating and a preparation method thereof. The preparation method comprises the steps that a reactive magnetron sputtering technology is adopted for cathode sputtering of a metal Mo and B4C and MoS2 composite target, the target reacts with N2 gas in Ar and N2 mixed gas in a vacuum chamber, and a Mo-B-S-C-N five-element hard coating, namely the boron molybdenum nitride / molybdenum sulfide nano composite coating, is obtained on the surface of a substrate. By adjusting the areas of B4C and MoS2 in the composite target, the contents of B and S in the coating are easy to control. The atomic percentages of B, C, S, Mo and N elements in the coating are 0.5-12%, 2-14%, 0.5-10%, 55-40% and 42-24% respectively. The method is simple in process and easy to implement. The method overcomes the defects of tribological properties of an existing hard coating, has the characteristics of high hardness, wear resistance anda low friction coefficient from room temperature to high temperature, and has favorable application prospects and popularization value on high-speed or dry cutting tools.

Description

Technical field [0001] The invention belongs to the technical field of material surface coating, and specifically relates to a boron-molybdenum nitride / molybdenum sulfide nano composite coating and a preparation method thereof. Background technique [0002] With the development of cutting technology, especially in some high-speed cutting and other specific machining situations, such as deep hole machining and some complex machining environments, when the cutting fluid cannot be fully lubricated and cooled, the performance requirements of the tool materials are higher. Under high-speed cutting conditions or when partial lubrication and cooling are not adequate, the large amount of cutting heat generated by friction will gradually cause the tool to wear and fail, and the quality of the workpiece will be reduced. This means that the tool itself needs to have the characteristics of high hardness, good wear resistance, stable chemical properties, heat resistance and oxidation resistan...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/35C23C14/3407C23C14/06C23C14/345C23C14/0036Y02E60/36
Inventor 朱晓东王大伟李倩叶李雁淮宋忠孝
Owner XI AN JIAOTONG UNIV
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