Preparation method of electrochemical sensor electrode material for detecting aniline
A sensor electrode and electrochemical technology, applied in the direction of material electrochemical variables, gaseous chemical plating, metal material coating technology, etc., can solve the problems of complex coupling and synergistic effects, and achieve large detection range, high detection sensitivity, repeatability The detection effect is stable
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[0022] Example 1: Boron, azite to doped with diamond film deposition
[0023] The p-type (100) single crystal silicon wafer was ground by 500 microns of diamond powder for 15 minutes, and then placed in a microwave plasma chemical vapor deposition equipment chamber, boron, nitrogen doped diamond film deposition. The microwave power is 1 kW during the deposition; the gas flow is hydrogen 200 sccm, methane 6Sccm, trimethyl borate 2Sccm, nitrogen 2Sccm; gas pressure 8 kPa, substrate temperature 900 ° C, growth time 6 hours. Scanning electron microscopy shows that boron, nitrogen-doped diamond film, complete, intact, grain size of about 1 to 2 microns (see figure 1 ). Reconsible as sample 1. The sample has good conductive properties to meet electrochemical electrode applications.
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[0024] Example 2: Boron doped diamond film growth
[0025] The p-type (100) single crystal silicon wafer was ground by a particle diameter of 500 microns for 15 minutes, and then placed in a microwave plasma chemical vapor deposition equipment chamber, a boron doped diamond film deposition was performed. The deposited gas flow is hydrogen 200 sccm, methane 6Sccm, trimethyl borate 2SCCM. Growing pressure 8kpa, substrate temperature 900 ° C, growth time is 6 hours. Scanning electron microscopy shows that the growth of boron doping diamond thin film is tight, complete, grain size of about 2 to 3 microns (see figure 2 ). Reconsible as sample 2. Samples have good conductivity to meet electrochemical electrode applications.
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[0026] Example 3: Comparison of electrochemical properties of boron doping and boron nitrogen-doped diamond membrane
[0027] Electrochemical electrodes were fabricated using the doped diamond membrane prepared in Example 1 and Example 2, and the electrodes were linearly scanned in a 0.5 m sulfuric acid solution. From test results ( image 3 It can be seen that the boronzapine co-doped diamond electrode potential window is almost as wide as the boron doping diamond electrode, but its reaction current is much larger than the latter. The large reaction current causes the boronzapine co-doped diamond electrode to have higher test sensitivity than the boron doping diamond electrode, so a more excellent sensor performance can be obtained.
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