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Vanadium/yttrium co-doped DLC coating and preparation method thereof

A technology of co-doping and coating, applied in coating, metal material coating process, plating of superimposed layers, etc., can solve the problems of affecting the wear resistance of DLC, poor thermal stability, decreased adhesion, etc. Wear resistance, improve thermal stability, reduce the effect of internal stress

Active Publication Date: 2022-01-11
广州今泰科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the hardness of the DLC film is very high, and its internal stress is also very large, which leads to the decrease of the adhesion of the DLC film to the substrate, and also limits the stable thickness that can be deposited on the substrate, thus affecting the performance of DLC's wear resistance.
In addition, the thermal stability of DLC is poor. The reason is that DLC is usually an amorphous structure and is a metastable phase. When the temperature rises, the DLC coating will undergo graphitization, transforming from sp3 bonds to sp2 bonds, thereby causing DLC Changes in the structure and properties of the coating

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A preparation method of vanadium / yttrium co-doped DLC coating, the steps are as follows:

[0021] (1) Substrate pretreatment: use cemented carbide tools as the substrate, degrease and polish the substrate, then ultrasonically clean it in acetone, ethanol and deionized water at 30kHz for 10min, and finally use high-purity nitrogen with a purity ≥ 99.5% blow dry, spare;

[0022] (2) Installation: Put the pretreated substrate on the turret rod of the vacuum chamber of the coating equipment, and make the turret rod rotate with the turret to ensure the uniformity of the coating process, and install the vanadium target and the yttrium target in the furnace on the body wall as a source of doping;

[0023] (2) Ion etching cleaning: vacuumize to a vacuum of 2.0×10 -1 Pa, with a flow rate of 80sccm, the argon gas is passed through the ion source into the vacuum chamber, the power of the ion source is controlled at 1.0kW, and the substrate is negatively biased to 450V. The surfa...

Embodiment 2

[0030] A preparation method of vanadium / yttrium co-doped DLC coating, the steps are as follows:

[0031] (1) Substrate pretreatment: use cemented carbide tools as the substrate, degrease and polish the substrate, then ultrasonically clean it in acetone, ethanol and deionized water at 30kHz for 10min, and finally use high-purity nitrogen with a purity ≥ 99.5% blow dry, spare;

[0032] (2) Installation: Put the pretreated substrate on the turret rod of the vacuum chamber of the coating equipment, and make the turret rod rotate with the turret to ensure the uniformity of the coating process, and install the vanadium target and the yttrium target in the furnace on the body wall as a source of doping;

[0033] (2) Ion etching cleaning: vacuumize to a vacuum of 2.5×10 -1 Pa, with a flow rate of 90sccm, the argon gas is passed through the ion source into the vacuum chamber. The power of the ion source is controlled at 1.5kW, and the substrate is negatively biased to 500V. The surfa...

Embodiment 3

[0040] A preparation method of vanadium / yttrium co-doped DLC coating, the steps are as follows:

[0041] (1) Substrate pretreatment: use cemented carbide tools as the substrate, degrease and polish the surface of the substrate, then ultrasonically clean it in acetone, ethanol and deionized water at 50kHz for 5min, and finally use high-purity nitrogen with a purity ≥ 99.5% blow dry, spare;

[0042] (2) Installation: Put the pretreated substrate on the turret rod of the vacuum chamber of the coating equipment, and make the turret rod rotate with the turret to ensure the uniformity of the coating process, and install the vanadium target and the yttrium target in the furnace on the body wall as a source of doping;

[0043] (2) Ion etching cleaning: vacuumize to a vacuum degree of 3.0×10 -1 Pa, argon gas is passed through the ion source into the vacuum chamber at a flow rate of 100 sccm, the power of the ion source is controlled at 2.0kW, the negative bias of the substrate is 550...

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Abstract

The invention discloses a vanadium / yttrium co-doped DLC coating and a preparation method thereof. The preparation method comprises the following steps of firstly depositing a Cr or Ti undercoat on a substrate, and then depositing a CrC or TiC transition coating on the surface of the undercoat; and next, depositing the vanadium / yttrium co-doped DLC coating on the surface of the transition coating by taking vanadium and yttrium as doped metal sources. The DLC coating is doped with the vanadium element and the yttrium element at the same time, the internal stress of the DLC coating can be greatly reduced, therefore the adhesive force of the DLC coating to the substrate is remarkably enhanced, and the film-substrate binding force is up to 70 N or above. Meanwhile, through doping of the vanadium, a chemical transfer membrane with lubricity can be formed in the friction process of the coating, and therefore the wear resistance of the coating is improved. Through doping of the yttrium, dense fine particles of non-columnar crystal nanostructures can be formed, the surface roughness of the coating is reduced, and therefore the wear resistance of the coating is improved. By doping the yttrium, the graphitization temperature of DLC can be increased, and therefore the thermal stability of the DLC is improved.

Description

technical field [0001] The invention belongs to the technical field of coating materials, and in particular relates to a vanadium / yttrium co-doped DLC coating and a preparation method thereof. Background technique [0002] Cemented carbide tool is a kind of tool made of hard alloy, and the use of coating technology can effectively improve the service life of the carbide tool, so that the tool can obtain excellent comprehensive mechanical properties, thereby greatly improving the machining efficiency of the tool . [0003] Diamond-like carbon film (DLC) is an amorphous film, which is very suitable as a coating for cemented carbide tools due to its high hardness and high elastic modulus, low friction coefficient, wear resistance and good vacuum tribological properties. . In general, the internal stress, elastic modulus and hardness of the coating are proportional to each other, resulting in the greater the hardness of the coating, the greater the internal stress. However, t...

Claims

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Application Information

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IPC IPC(8): C23C14/02C23C14/06C23C14/14C23C14/34C23C16/26C23C28/00
CPCC23C14/025C23C14/022C23C14/34C23C14/14C23C14/0605C23C14/0635C23C16/26C23C28/322C23C28/343C23C28/341C23C28/347
Inventor 梁献文苏东艺黄现章杜日昇
Owner 广州今泰科技股份有限公司
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