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Composite abrasive particle of polyacrylamide grafted nano-diamond as well as preparation method and application of composite abrasive particle

A nano-diamond and polyacrylamide technology, which is applied in metal processing equipment, grinding/polishing equipment, polishing compositions containing abrasives, etc., can solve the problem of decreased processing rate in polishing process, decreased workpiece surface quality, and can not meet polishing requirements. and other problems, to achieve the effect of increasing the number of effective abrasive particles, increasing the contact area, and improving the chance of chemical action

Pending Publication Date: 2022-03-11
苏州博来纳润电子材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Diamond abrasive grains have the advantage of high polishing rate, and are usually used in the rough polishing process of the workpiece surface. However, due to the high hardness of diamond itself, it is easy to cause deep scratches and pits on the surface, causing sub-surface damage, and making the surface quality of the workpiece decline
Therefore, it is necessary to use silicon oxide abrasive grains for the second step of fine polishing, which will lead to a decrease in the overall processing rate of the polishing process and cannot meet the growing polishing requirements

Method used

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  • Composite abrasive particle of polyacrylamide grafted nano-diamond as well as preparation method and application of composite abrasive particle
  • Composite abrasive particle of polyacrylamide grafted nano-diamond as well as preparation method and application of composite abrasive particle
  • Composite abrasive particle of polyacrylamide grafted nano-diamond as well as preparation method and application of composite abrasive particle

Examples

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Effect test

preparation example Construction

[0042] The preparation method of the composite abrasive grain of polyacrylamide grafted nano-diamond of the present invention, it comprises the steps:

[0043] (1), pretreated nano-diamond: a certain amount of nano-diamond powder is mixed with 2wt% organic acid, ball milled for 6h, and the metal impurities adsorbed on the surface of nano-diamond are removed by acid treatment to obtain the first mixed solution; then, the first mixed Wash with water to neutrality to obtain well-dispersed pretreated nano-diamonds;

[0044] (2), surface silanization of pretreated nano-diamonds: mix a certain amount of pre-treated nano-diamonds with absolute ethanol, and ultrasonically 1-2h (preferably 0.5h) at room temperature to obtain the second mixed solution; The mixed solution is slowly heated to 80-100°C (preferably 90°C), and the alcohol solution of the silane coupling agent KH570 is added dropwise to obtain the third mixed solution; 9h (preferably 8h) to form silanized nano-diamond partic...

Embodiment 1

[0057] see figure 1 , the composite abrasive grains of polyacrylamide grafted with nano-diamond in this embodiment, the inner core is nano-diamond, and the polyacrylamide coating layer is formed on the surface of diamond by free radical polymerization through silane coupling agent KH570, wherein, polyacrylamide and nano-diamond The mass ratio of diamond is 0.2:1.

[0058] The preparation method of the composite abrasive grain grafted with polyacrylamide of the present embodiment comprises the following steps:

[0059] (1), pretreated nano-diamond: 10g nano-diamond powder is mixed with 2wt% organic acid (mixed acid of 1wt% citric acid and 1wt% gallic acid), ball milled for 6h, and the metal adsorbed on the surface of nano-diamond is removed by acid treatment Impurities are removed to obtain the first mixed solution; then, the first mixed solution is washed to neutrality to obtain well-dispersed pretreated nano-diamonds.

[0060] (2), surface silanization of pretreated nano-di...

Embodiment 2

[0064] This embodiment is basically the same as Embodiment 1, and the special features are:

[0065] The composite abrasive grains of polyacrylamide grafted with nano-diamond in this embodiment, the inner core is nano-diamond, and the polyacrylamide coating layer is formed by free radical polymerization on the surface of diamond through silane coupling agent KH570, wherein, polyacrylamide and nano-diamond The mass ratio is 0.4:1.

[0066] In the preparation method of the composite abrasive grain grafted with polyacrylamide of the present embodiment:

[0067] (1), this step is identical with embodiment 1.

[0068] (2), this step is identical with embodiment 1.

[0069] (3) Preparation of composite abrasive grains of polyacrylamide-grafted nano-diamonds: 4 g of silylated nano-diamonds in step (2) were mixed with 100 g of deionized water, and ultrasonically dispersed to form a uniform suspension. Then, under the protection of nitrogen atmosphere, the water bath was heated to 8...

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Abstract

The invention provides a polyacrylamide grafted nano-diamond composite abrasive particle and a preparation method and application thereof, the inner core of the composite abrasive particle is nano-diamond, the surface of the nano-diamond is coated with polyacrylamide through a silane coupling agent, and the mass ratio of the polyacrylamide to the nano-diamond is (0.2-0.8): 1; the hydrophilicity and steric hindrance effect of polyacrylamide in the composite abrasive particle help the nano-diamond to be better dispersed in an aqueous solution, and the number of effective particles is increased; the polyacrylamide coating layer weakens the impact of the nano-diamond on the surface of a workpiece, and the elastic deformation of the composite abrasive particles can increase the contact area with the ceramic, so that the mechanical action is enhanced and the chemical action opportunity is improved; according to the composite abrasive particle, the surface roughness is remarkably reduced while the high polishing rate is kept, and therefore the high material removal rate can be kept while the ultra-smooth surface of the zirconia ceramic is achieved, and the overall quality of the machining technology is improved.

Description

technical field [0001] The invention belongs to the technical field of chemical mechanical polishing, and in particular relates to a composite abrasive grain grafted with polyacrylamide nano-diamond and a preparation method and application thereof. Background technique [0002] Yttria-stabilized nano-zirconia ceramics have excellent properties such as high mechanical strength, stable chemical properties, high wear resistance, excellent corrosion resistance and heat resistance, so they are widely used in aerospace, energy, semiconductor, computer, medical and other fields. With the improvement of process requirements, the surface quality of zirconia ceramics needs to achieve nano-level planarization. However, the inherent hard and brittle characteristics of zirconia ceramics have become a difficulty in its surface processing technology. Therefore, chemical mechanical polishing (CMP) is needed to achieve ultra-planarization and efficient removal of ceramic surfaces. [0003...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08F292/00C08F220/56B24B57/00C09G1/02
CPCC08F292/00B24B57/00C09G1/02C08F220/56
Inventor 雷红丁如月张泽芳
Owner 苏州博来纳润电子材料有限公司
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