The invention provides a Laplace-DLTS stabilization inversion method and
system, and the method comprises the steps: applying a pulse bias
voltage to a tested
semiconductor device, and collecting a transient
capacitance signal of the tested
semiconductor device; the transient
capacitance signal is preprocessed; performing inverse Laplacian transformation
processing on the preprocessed transient
capacitance signal, and introducing at least one of non-negative constraint, sparsity constraint, physical prior constraint and time window segmentation constraint in an inversion process; carrying out optimization
processing on the obtained inversion result, and judging the stability of the inversion result; and extracting a deep
energy level trap parameter based on the inversion result, and outputting the deep
energy level trap parameter and the processed transient spectrum data. At least one, preferably at least two, constraint conditions are introduced in the inverse Laplacian inversion process, so that the influence of
noise and abnormal peaks on the inversion result is effectively inhibited, and the stability, physical consistency and parameter extraction reliability of the inversion are improved.