Yttrium modified chromium aluminium carbonitride/silicon nitride nano composite coating and deposition method thereof

A nano-composite coating, chrome-aluminum carbonitride technology, applied in coatings, metal material coating processes, layered products, etc., can solve problems such as corrosion and easy oxidation of coatings

Active Publication Date: 2013-12-11
JIANGXI SCI & TECH NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This type of composite coating has high hardness, toughness and structural stability, but the coating is prone to oxidation or corrosion failure at high temperatures

Method used

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  • Yttrium modified chromium aluminium carbonitride/silicon nitride nano composite coating and deposition method thereof

Examples

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Effect test

Embodiment 1

[0011] Single crystal silicon wafer, M42 high speed steel standard sample and 8mm twist drill bit are coated after degreasing, derusting, organic solution cleaning and plasma cleaning. The deposition temperature is 250°C, the workpiece is applied with a pulsed negative bias, the frequency is 80KHz, the peak value is 400V, the duty cycle is 60%, the Ar is introduced, the air pressure is 0.4Pa, and the DC magnetron sputtering Cr is turned on. 49 al 49 Y 2 (atomic ratio) target, power density 5W / cm 2 , deposit CrAlY alloy bonding layer for 5min; pulse bias negative voltage peak value is adjusted to 200V, and CrAlY target power density is increased to 10W / cm 2 , Ar partial pressure linearly decreased from 0.4Pa to 0.2Pa within 10 minutes, and N 2 , N 2 The partial pressure is linearly increased from 0Pa to 0.2Pa within 10 minutes, and the CrAlYN transition layer is deposited for 10 minutes; keep the bias, Ar and N 2 The partial pressure remains unchanged, and CH 4 , the part...

Embodiment 2

[0013] Single crystal silicon wafer, YG8 cemented carbide standard sample and 10mm flat end mill, after degreasing, derusting, organic solution cleaning and plasma cleaning, deposited coating. The deposition temperature is 400°C, the workpiece is applied with a pulsed negative bias, the frequency is 80KHz, the peak value is 600V, the duty cycle is 60%, the Ar is introduced, the air pressure is 0.4Pa, and the DC magnetron sputtering Cr is turned on. 39 al 59 Y 2 (Atomic ratio) target, power density 5W / cm2, deposition of CrAlY alloy bonding layer for 5min; pulse negative bias peak value adjusted to 200V, CrAlY target power density increased to 10W / cm 2 , Ar partial pressure decreased linearly from 0.4Pa to 0.2Pa within 10 minutes, and N 2 , N 2 The partial pressure is linearly increased from 0Pa to 0.2Pa within 10 minutes, and the CrAlYN transition layer is deposited for 10 minutes; keep the bias, Ar and N 2 The partial pressure remains unchanged, and CH 4 , the partial pre...

Embodiment 3

[0015] Single crystal silicon wafers, fine-grained hard alloy standard test samples and 1.2mm PCB milling cutters are coated after degreasing, derusting, organic solution cleaning and plasma cleaning. The deposition temperature is 300°C, the workpiece is applied with a pulsed negative bias, the frequency is 80KHz, the peak value is 300V, the duty cycle is 60%, the Ar is introduced, the air pressure is 0.3Pa, and the DC magnetron sputtering Cr is turned on. 39 al 59 Y 2 (atomic ratio) target, power density 5W / cm 2 , depositing a CrAlY alloy bonding layer for 2 minutes; the peak value of the pulse negative bias is adjusted to 200V, and the power density of the CrAlY target is increased to 15W / cm 2 , Ar partial pressure decreased linearly from 0.4Pa to 0.2Pa within 5 minutes, and N 2 , N 2 The partial pressure is linearly increased from 0Pa to 0.2Pa within 5 minutes, and the CrAlYN transition layer is deposited for 5 minutes; keep the bias, Ar and N 2 The partial pressure re...

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Abstract

The invention relates to a yttrium modified chromium aluminium carbonitride/silicon nitride nano composite coating and a deposition method thereof. Chromium aluminium carbonitride and silicon nitride are subjected to nano composite design to form a nano composite structure with nanocrystal chromium aluminium carbonitride implanted into amorphous silicon nitride, so that the rigidity of the coating is improved; the toughness of the coating and bonding strength of the coating and a matrix are both considered; a rare earth element Y is introduced simultaneously, so that the mechanical property and high-temperature oxidation resistance of the coating are further improved; and the nano composite coating which is strong in bonding force, high in rigidity, good in toughness, low in friction coefficient and prominent in thermostability and is used for high-speed steel and hard alloy cutters and molds is obtained. The coating comprises a chromium-aluminum-yttrium bonding layer, a chromium-aluminum-yttrium nitride transition layer and a nano composite layer; the membrane/matrix bonding strength of the obtained coating reaches 40-90N; the surface composite strength under 10g load reaches 40-65 GPa; and the friction coefficient is 0.2-0.5 when matched with GCr15.

Description

technical field [0001] A yttrium-modified chromium carbonitride aluminum / silicon nitride nanocomposite coating for machining tools and a deposition method thereof, the coating is applied to the surface strengthening of high-speed steel and hard alloy tools to improve tool life and workpiece processing Quality belongs to the field of new materials. Background technique [0002] The multi-phase composite coating with nanostructure includes at least two phases, one phase is a nanocrystalline phase, and the other metal phase or an amorphous ceramic matrix is ​​implanted. In this structure, the small grain size reduces the dislocation density on the one hand, and hinders the movement of dislocations on the other hand, thereby increasing the hardness of the material. According to whether the parent phase is a metal phase or an amorphous ceramic phase, it can be divided into nc-TMN / Metal (TM: transition metal) in which a nanocrystalline hard phase is implanted into a metal soft ph...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35B32B9/04
Inventor 李明升张迎张淑娟王丽
Owner JIANGXI SCI & TECH NORMAL UNIV
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