A high-performance gas sensor based on a laminated structure and its preparation method
A technology of gas sensor and laminated structure, which is applied in the field of gas sensor to achieve the effect of improving performance, improving response recovery speed, and good conductivity
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[0023] The method for preparing an ordered composite gas sensor based on a heterostructure provided by the present invention specifically includes the following steps:
[0024] (1) Preparation of substrate:
[0025] Select aluminum oxide, silicon oxide, glass or sapphire inert material as the substrate, ultrasonically clean the substrate in an acetone solution to remove surface stains, and then take out the substrate to clean the remaining organic solution with deionized water.
[0026] Using screen printing or mask photolithography to fabricate metal conductive electrodes, such as gold, silver, and platinum, on the substrate to obtain the sensor substrate.
[0027] (2) Preparation of conductive layer:
[0028] Select tin oxide or zinc oxide as the raw material, and use screen printing, hydrothermal synthesis, and laser pulse deposition to make a conductive layer material on the sensor substrate.
[0029] (3) Preparation of sensitive layer:
example 1
[0035] Alumina was chosen as the substrate. The alumina substrate was ultrasonically cleaned in an acetone solution for 10 minutes to remove surface stains, and then the substrate was taken out to clean the remaining organic solution with deionized water. The platinum conductive electrode platinum is fabricated on the substrate by screen printing to obtain the sensor substrate.
[0036] Select tin oxide powder as the raw material, mix terpineol, butyl carbitol acetate, and dibutyl phthalate according to a mass ratio of 6:3:1 to form an organic solvent, and then mix the tin oxide raw material powder with The organic solvents are mixed according to a mass ratio of 6:4, ball milled at a speed of 400 revolutions per minute for 3 hours to obtain a slurry, and a layer of tin oxide conductive layer material is printed on the sensor substrate by screen printing. Then put it in a 120°C oven for 2 hours to keep the conductive layer material solidified.
example 2
[0040] Select glass material as the substrate. The glass substrate was ultrasonically cleaned in an acetone solution for 10 minutes to remove surface stains, and then the substrate was taken out to clean the remaining organic solution with deionized water. Using mask photolithography to fabricate silver conductive electrodes on the substrate to obtain the sensor substrate.
[0041] Select zinc nitrate as the solute and deionized water as the solvent to prepare a 0.05mol / L zinc solution, add hexamethylenetetramine with a molar ratio of 1:1 to zinc nitrate as an ammonia release agent to obtain a zinc oxide growth solution. The substrate was put in the growth solution, and hydrothermal growth was performed at 90°C for 4 hours. After taking it out, it was repeatedly rinsed with deionized water, and finally dried in an oven at 80°C to obtain a conductive layer of zinc oxide.
[0042] After mixing concentrated hydrochloric acid and deionized water at a volume ratio of 1:1, add tetrabut...
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