Fabrication method of large-area highly ordered porous oxide films based on soft nanoimprinting

A porous oxide film, highly ordered technology, applied in the direction of anodic oxidation, surface reaction electrolytic coating, coating, etc., can solve the problems of long operation time, cumbersome operation, high cost, etc., and achieve the goal of convenient method and high tolerance Effect
CN105926014BActive Publication Date: 2019-03-12SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI
Publication Date
2019-03-12

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Abstract

The invention provides a preparation method of large-area highly-ordered porous oxide films based on nano soft embossing. The preparation method at least comprises the following steps: firstly copying a micro-nano-sized ordered structure of a mother template to a silica gel soft template, simultaneously providing a metal substrate and pretreating the metal substrate; then coating the surface of the metal substrate with an ultraviolet curing adhesive, carrying out nano embossing treatment on the ultraviolet curing adhesive by using the silica gel soft template, removing the silica gel soft template, and forming the micro-nano-sized ordered structure on the ultraviolet curing adhesive; subsequently taking the ultraviolet curing adhesive as a mask, transferring the micro-nano-sized ordered structure to the metal substrate by using an etching process and removing the residual ultraviolet curing adhesive; and forming a porous oxide film on the surface of the metal substrate by using an anodic oxidation method. The preparation method can be used for preparing large-area oxide films such as HOAAO and HOATO and the like; the method is efficient and convenient and is low in cost.
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Description

technical field

[0001] The invention belongs to the technical field of micro-nano manufacturing, and relates to a method for preparing a porous oxide film, in particular to a method for preparing a large-area highly ordered porous oxide film based on nano soft imprinting. Background technique

[0002] Porous anodic oxide films (such as aluminum oxide (Anodic Aluminum Oxide, AAO), titanium oxide (Anodic Titanium Oxide, ATO), etc.) can self-organize and grow into a nano-scale hexagonal close-packed pore structure. Regulation can controllably obtain pore sizes ranging from tens of nanometers to hundreds of nanometers or even micrometers. The anodic oxidation method has low cost and simple process, and has broad application prospects in the fields of electronics, optoelectronics, biomedicine, and electrochemistry (Li., et al., Chem. Mater. 2009, 21, 253; Li., et al., Adv . Mater. 2008, 20, 4575; Zhang., et al., ECS Solid State Letters 2013, 2, Q1). The AAO and ATO grown by sel...

Claims

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