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A high hardness and high corrosion resistance high entropy alloy nitride coating and preparation method thereof

A high-entropy alloy and high-corrosion-resistant technology, applied in the field of materials science, can solve the problems of surface coating hardness and poor corrosion resistance, and achieve the effects of low cost, low energy consumption and fast deposition speed

Active Publication Date: 2019-11-15
SHANGHAI NEWARC COATING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] Aiming at the above-mentioned technical problems in the prior art, the present invention provides a high-hardness and high-corrosion-resistance high-entropy alloy nitride coating and a preparation method thereof, the high-hardness and high-corrosion-resistance high-entropy alloy nitride coating The coating and its preparation method should solve the technical problems of poor hardness and corrosion resistance of the surface coating in the prior art

Method used

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Effect test

preparation example Construction

[0032] The instruments used in the preparation method of the present invention are respectively:

[0033] JGP-450 multi-target magnetron sputtering apparatus;

[0034] M308457 ultrasonic cleaning machine;

[0035] The test method adopted in the present invention:

[0036] EDAX energy spectrometer (EDS) analysis components;

[0037] Tecnai G2F30 Field Emission Transmission Electron Microscope (HRTEM) to observe the microscopic morphology;

[0038] D / MAX 2550VB / PC type X-ray diffractometer (XRD) measures the phase composition;

[0039] NANO Indenter G200 nano-indenter was used to measure hardness and elastic modulus.

[0040] The preparation method of the present invention comprises the steps:

[0041] (1) Substrate cleaning

[0042] Clean the mirror-polished substrate with ultrasonic waves in absolute ethanol and acetone for 5-10 minutes;

[0043] Then perform ion cleaning: install the sample into the sample chamber, turn on Ar gas after vacuuming, maintain the vacuum degr...

Embodiment 1

[0055] The specific process parameters of the (AlCrTiZrNbV) N coating preparation method of the present invention are: the background vacuum degree of the vacuum chamber is better than 5 × 10 -3 Pa, target base distance: 5cm; sputtering atmosphere adopts Ar and N 2 The mixed gas, the flow rate of argon gas is 10 sccm, the flow rate of nitrogen gas is 10 sccm; deposition pressure: 0.2Pa; deposition temperature: 300°C; RF power supply: 300W. After testing, the obtained (AlCrTiZrNbV)N coating has a thickness of 2.9 μm, a hardness of 36.6 GPa, and a salt spray test of more than 120 hours (neutral 5% NaCl aqueous solution).

Embodiment 2

[0057] The specific process parameters of the (AlCrTiZrNbV) N coating preparation method of the present invention are: the background vacuum degree of the vacuum chamber is better than 5 × 10 -3 Pa, target base distance: 5cm; sputtering atmosphere adopts Ar and N 2 The mixed gas, the flow rate of argon gas is 20sccm, the flow rate of nitrogen gas is 20sccm; deposition pressure: 0.3Pa; deposition temperature: 200°C; RF power: 280W. After testing, the obtained (AlCrTiZrNbV)N coating has a thickness of 2.1 μm, a hardness of 35.9 GPa, and a salt spray test of more than 120 hours (neutral 5% NaCl aqueous solution).

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Abstract

The invention provides a high-hardness high-corrosion-resistance high-entropy alloy nitride coating. The molecular formula of the high-hardness high-corrosion-resistance high-entropy alloy nitride coating is (AlCrTiZrNbV)N. The invention further provides a preparation method of the coating. The method comprises the steps of firstly, cleaning a matrix and then conducting ion cleaning; secondly, sending the treated matrix to a sputtering chamber to deposit a TiN transition coating, controlling a Ti target material through a DC cathode and depositing the TiN transition coating of 100-200 nm; andthirdly, depositing a TiAlN transition coating on the TiN transition coating and depositing the (AlCrTiZrNbV)N coating on the TiAlN transition coating. The (AlCrTiZrNbV)N coating obtained through thepreparation method has high hardness exceeding 35 GPa and also has excellent corrosion resistance. The coating has the characteristics of being simple in production process, high in deposition speed,low in cost and the like and also has the advantages of being high in production efficiency, low in energy consumption and low in equipment requirement.

Description

technical field [0001] The invention belongs to the field of materials science, and relates to a material surface modification technology, specifically a high-hardness, high-corrosion-resistant, high-entropy alloy nitride coating and a preparation method thereof. Background technique [0002] With the development of advanced manufacturing industry, higher and higher requirements are put forward for the surface properties of materials. The surface of materials is required not only to have high hardness and wear resistance, but also to have excellent corrosion resistance and high temperature resistance. Some conventional binary or ternary nitride coatings have gradually failed to meet the higher requirements for protective coatings under harsh service conditions. In order to meet this demand, people try to add new elements on the basis of existing nitride coatings to prepare quaternary or multi-component nitride coatings. [0003] In particular, with the introduction of the c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/0036C23C14/0641C23C14/35C23C28/042
Inventor 冯利民李伟
Owner SHANGHAI NEWARC COATING TECH CO LTD
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