Method for drying polyimide paste and method for producing solar cells capable of highly-efficient photoelectric conversion
A technology of polyimide paste and solar cells, applied in the direction of photovoltaic power generation, final product manufacturing, sustainable manufacturing/processing, etc., to achieve the effects of improving productivity, improving productivity, and shortening drying time
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Embodiment 1～9、 comparative example 1、2
[0071] The effect of suppressing polyimide collapse by solvent spray was confirmed.
[0072] Specifically, using P.I Co., Ltd.'s polyimide Q-IP-0997-N for screen printing, it was printed on a silicon substrate by a screen printing method. The printing plate is made into the following pattern: a plurality of non-opening parts (non-printing parts) with a diameter of 100 μm are provided, and the other parts are printed on the entire surface. Various solvents were sprayed on the printed surface of the substrate immediately after printing, dried using a 140°C hot plate, and the printed shape was observed with a microscope. Table 1 shows the average value of the obtained opening diameters at 10 locations under each condition.
[0073] [Table 1]
[0074] Solvent composition Average value of opening diameter (μm) Example 1 Pure water98 Example 2 Ethanol95 Example 3 Acetic acid101 Example 4 2-propanol96 Example 5 Ethylene glycol102 Example 6 Methanol98 Example 7 1-butanol100 Ex...
Embodiment 10
[0077] The method of the present invention is used to produce solar cells.
[0078] For the phosphorus-doped {100}N type original cut silicon substrate with a thickness of 200μm and a specific resistance of 1Ω·cm, it is immersed in a 2% potassium hydroxide / 2-propanol aqueous solution at 72°C to form textures on both sides , And then wash in a mixed solution of hydrochloric acid / hydrogen peroxide heated to 75°C.
[0079] Then, the substrate is placed in the heat treatment furnace in a state where the two pieces are combined and superimposed, and BBr is introduced 3 The mixed gas of oxygen and argon is heat-treated at 1000°C for 10 minutes, and then thermally oxidized in an oxygen atmosphere at 1000°C for 3 hours to form a mask. Then, it was measured by the four-probe method, and as a result, the sheet resistance was 50Ω.
[0080] A laser is used to form an opening on the mask on the back side. Laser source uses Nd: YVO 4 The second higher harmonics. The opening pattern is formed in...
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