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Preparation process of Zr-Ti-B-N nano composite coating in reducing atmosphere

A nano-composite coating, zr-ti-b-n technology, applied in the direction of metal material coating process, coating, nanotechnology, etc., can solve the problem of limited application, high loss of coating hardness, affecting the mechanical properties and tribology of the coating behavior and other issues, to achieve the effect of improving mechanical properties, improving coating toughness, and eliminating coating defects

Active Publication Date: 2020-09-11
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the presence of impurity O elements in the coating often leads to high hardness loss of the coating, and introduces crystal defects such as dislocations and grain boundaries, which will seriously affect the mechanical properties and tribological behavior of the coating, limiting its application on the tool surface. application

Method used

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  • Preparation process of Zr-Ti-B-N nano composite coating in reducing atmosphere
  • Preparation process of Zr-Ti-B-N nano composite coating in reducing atmosphere
  • Preparation process of Zr-Ti-B-N nano composite coating in reducing atmosphere

Examples

Experimental program
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Effect test

Embodiment 1

[0034] In this embodiment, a Zr-Ti-B-N coating is deposited on a mirror-polished single-crystal Si wafer ((100) crystal plane), and the size of the substrate is 50mm×10mm×0.7mm. Before coating, the substrate was ultrasonically cleaned in alcohol solution for 20 minutes, then dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on the V-TECH AS610 high-power pulse and pulse DC composite magnetron sputtering coating machine. The coating machine is also equipped with an arc ion plating cathode. The target materials are respectively metal Cr target and compound ZrB 2 target and TiB 2 Targets (all with a purity of wt.99.9%), the former is used for bombardment cleaning and deposition of CrN transition layer on the substrate surface, and the latter is used for deposition of Zr-Ti-B-N coating; the working gas and reaction gas are respectively selected from high-purity Ar (purity 99.999%), N 2 +H2...

Embodiment 2

[0038] In this embodiment, a Zr-Ti-B-N coating is deposited on a mirror-polished YG8 cemented carbide substrate, and the size of the substrate is 30mm×30mm×3mm. The substrate is first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone, degreasing agent, ultrapure water and alcohol solution, dried with high-purity nitrogen, and placed on the sample holder in the vacuum chamber facing the target. The deposition parameters are the same as in Example 1.

[0039] Figure 5 It is the hardness test result of Zr-Ti-B-N coating deposited on the cemented carbide substrate. It can be seen that the hardness test value of the coating fluctuates less, ranging from 24 to 27GPa, and the average value of ten measurements is 25.4±0.8GPa, indicating that the hardness of the coating is relatively high. The bonding strength between the coating and the substrate is tested by the scratch method. The tip radius of the diamond scratch head is 200 μm, the normal...

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Abstract

The invention discloses a preparation process of a Zr-Ti-B-N nano composite coating in a reducing atmosphere, and belongs to the technical field of coating preparation. The Zr-Ti-B-N nano composite coating is deposited on a substrate by adopting a high-power pulse and pulse direct-current composite magnetron sputtering technology. In order to improve the binding force between the coating and the substrate, Ar gas is introduced before film plating, ion bombardment cleaning is conducted on the surface of the substrate through an arc ion Cr plating target, then mixed gas of N2 and H2 is introduced, and a CrN transition layer is deposited. And then the Cr target is closed, the TiB2 target and the ZrB2 target are sequentially connected with a high-power pulse magnetron sputtering cathode and apulse direct-current magnetron sputtering cathode, Ar, N2 and H2 are started ignition in a mixed atmosphere, and the Zr-Ti-B-N coating is started to deposit. The nano-composite coating prepared by themethod has high hardness and elastic modulus, good wear resistance, compact organizational structure and strong binding force between the coating and the substrate.

Description

technical field [0001] The invention relates to the technical field of coating preparation, in particular to a preparation process of a Zr-Ti-B-N nanocomposite coating in a reducing atmosphere. Background technique [0002] In recent years, the use of wear-resistant hard coatings on machinery, forging and forming devices has become more and more important. It can not only improve the oxidation resistance of the tool surface, but also enable the tool to withstand higher cutting temperatures, which is conducive to improving cutting speed and The processing efficiency is improved, and the impact of cutting fluid on the environment is reduced or eliminated, and the application range of dry cutting is expanded. Zr-B-N ternary nanocomposite coating has high toughness, excellent wear resistance and chemical stability, and is expected to be used on the surface of cutting tools, molds and mechanical parts. Doping Ti element into Zr-B-N coating can further strengthen the coating thro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35B82Y30/00B82Y40/00C23C14/02C23C14/06C23C14/32
CPCC23C14/352C23C14/0641C23C14/022C23C14/024C23C14/325C23C14/0021B82Y30/00B82Y40/00
Inventor 王铁钢许人仁郭玉垚阎兵尹照星刘艳梅
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE