The invention relates to a
wafer adsorption device with an anti-falling function. The
wafer adsorption device comprises a connecting
pipe and a suction
nozzle, wherein the connecting
pipe is vertically arranged; the suction
nozzle is arranged at the bottom end of the connecting
pipe; an executing mechanism and an auxiliary mechanism are arranged on the connecting pipe; the executing mechanism comprises an executing
assembly and two locking assemblies, the executing
assembly is arranged in the connecting pipe, and the two locking assemblies are evenly distributed in a circumferential directionwith the axis of the connecting pipe as a center; the executing
assembly comprises a
magnet disc, a first
electromagnet, a connecting rod, a supporting ring, an auxiliary block and two first springs;and each locking assembly comprises a guide hole, a moving rod, a second spring, a rolling wheel and at least two second electromagnets. According to the
wafer adsorption device with the anti-fallingfunction, the function that the suction
nozzle adsorbs the wafer is achieved through the executing mechanism; in addition, the situation that the wafer falls off from the suction nozzle due to too large wind resistance in the process that the suction nozzle drives the wafer to move can be prevented through the auxiliary mechanism, so the stability of the device is improved.