Molybdenum base nitride composite ganoine thin film and preparation thereof

Abstract

The invention discloses a Mo-based nitride composite hard film and a preparation method; wherein, the substrate is coated with nanometer composite hard film that is made of Mo-based metal nitride or nonmetal nitride, the crystal grain size of the film is 5-40nm, the thickness of the film is 1-5Mum, the molar percentage between the Mo element and the substitution element in the film is 50 to 94%: 6 to 50%; the preparation method comprises the following steps: (a) the target material (made of Mo and the substitute) and the substrate are respectively arranged on the cathode and sample table in vacuum room of magnetic control sputtering equipment, the area ratio of the Mo and the substitution in the target material is 1 to 8 : 8 to 1, the distance between the target material and the substrate is 40-80mm; (b) after the vacuum degree in the vacuum room is less than or equal to 8 x 10<-4>pa and substrate temperature reaches 300 to 500 DEG C, the vacuum room is made to be in the atmosphere of argon and nitrogen mixed gas and 30-130 minutes sputtering is made so as to prepare the Mo-based nitride composite hard film. The Mo-based nitride composite hard film can widely be used for material protection and can improve abradability and durability of material obviously.

Description

technical field [0001] The invention relates to a hard film and a preparation method thereof, in particular to a molybdenum-based nitride composite hard film and a preparation method thereof. Background technique [0002] The rapid development of modern industry has put forward higher and higher requirements on the performance of materials, and the use of hard films for material protection is an economical and applicable way to improve material performance. For example, depositing a single-layer, multi-layer or composite hard film on cutting tools and molds made of high-speed steel or cemented carbide has a significant effect on improving its wear resistance and durability. At present, common coatings can be roughly divided into three types, one is titanium-based hard film coatings, including titanium nitride (TiN), titanium carbide (TiC), titanium carbonitride (TiCN), titanium aluminum nitride (TiAlN), etc.; they have been increasingly widely used in tools, molds, decorati...

AI Technical Summary

Problems solved by technology

At present, common coatings can be roughly divided into three types, one is titanium-based hard film coatings, including titanium nitride (TiN), titanium carbide (TiC), titanium carbonitride (TiCN), titanium aluminum nitride (TiAlN), etc.; they have been increasingly widely used in tools, molds, decoration and other industries, but still cannot satisfy many difficult-to-process materials, such as high-alumina-silicon alloys, various non-ferrous metals and their alloys, engineering plastics, non-ferrous Requirements for the use of metal materials, ceramic composite materials, etc.

The second is diamond film, because of its extremely high hardness, elastic modulus and excellent chemical stability, it has been widely valued by countries all over the world since the 1980s; the process of preparing diamond film by chemical vapor deposition It is relatively mature, but the requirements for the equipment during the preparation of the film are very strict, resulting in high manufacturing costs, and there is a technical problem of poor bonding with cemented carbide

The third is the diamond-like carbon film, which has many properties similar to diamond, such as high hardness and low friction coefficient; however, the film thickness is limited due to the large internal stress during the deposition process, and in Poor thermal stability and easy graphitization during application

However, the MoNx thin film and its preparation method also have shortcomings. First, the hardness and oxidation resistance temperature of the film are relatively low, and the friction coefficient is relatively high. The coefficient is higher than 0.4, so that its application range is limited to a certain extent; secondly, although the preparation method has the advantage of high deposition rate, it also has insurmountable defects. First, the process temperature requires high , it is easy to cause the bending strength of the material to decrease, the second is that the film is in a state of tensile stress, which is easy to cause microcracks when the tool is used, and the third is that the waste gas and waste liquid discharged from the process will cause greater environmental pollution, which is different from the current strongly advocated Green manufacturing concept conflicts

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