Implantable microneedle tip electrode and manufacturing method thereof
A manufacturing method and micro-needle tip technology, applied in the direction of electrodes, internal electrodes, circuits, etc., can solve the problems of large tissue damage, difficult to control the size, high process cost, etc., to reduce tissue damage, suitable for long-term implantation, implantation safety convenient effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0041] The specific embodiments of the present invention will be described in further detail below in conjunction with the drawings and embodiments. The following examples are used to illustrate the present invention, but not to limit the scope of the present invention.
[0042] Such as figure 1 As shown, the manufacturing method of the implantable micro-needle tip electrode of the present invention includes the following steps:
[0043] A: A metal electrode with a parylene-metal alloy-parylene structure is made by parylene growth, photolithography, sputtering, wet etching and oxygen plasma etching on a silicon wafer coated with aluminum film Layers, including: stimulation points, interconnection lines and lead contacts;
[0044] This step can be achieved by the following method.
[0045] A1: Use silicon wafer 2 and evaporate aluminum film 1 to make an aluminum sacrificial layer, where the thickness of aluminum film 1 can be about 1 μm, such as figure 2 (a);
[0046] A2: Deposit para...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap