High temperature resistant antioxidative metal ceramic composite coating and preparation method thereof

A metal-ceramic composite and anti-oxidation technology, applied in metal material coating process, coating and other directions, can solve the problems of easy cracking and short thermal shock resistance life of ceramic coatings, and achieve good high temperature oxidation resistance and fast deposition rate. Effect

Inactive Publication Date: 2014-01-29
SUZHOU HONGJIU AVIATION THERMAL MATERIALS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The multi-layer ceramic coating mainly composed of silicon carbide and molybdenum disilicide can make carbon/carbon composite materials reach 107h and 50h anti-oxidation time at 1680°C and

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Using graphite as the workpiece and high-purity molybdenum plate as the target, the vacuum deposition chamber is fed with trichloromethylsilane and argon from the air inlet, the flow rate of methane is 20ml / min, the flow rate of argon is 50ml / min, and the vacuum The indoor working pressure is 30Pa, the target voltage is -900V, and the workpiece voltage is -400V. First pass argon gas, adjust the working pressure to a stable state, and turn on the power switch. After heating and cleaning the surface of the workpiece for 30min-50min, when the deposition temperature is 1000 ℃, the trichloromethylsilane gas is introduced, and after 2h of deposition, a metal-ceramic composite coating with a thickness of about 18 μm can be obtained. The metal-ceramic composite coating is detected by X-ray diffraction, and the composite film is mainly composed of molybdenum and molybdenum silicide, with a small amount of molybdenum silicide phase. The coating consists of a dense polycrystallin...

Embodiment 2

[0024] The carbon / carbon composite material was used as the workpiece, the zirconium-10at.% hafnium alloy disk was used as the target material, and the flow rate of chloromethylsilane and argon gas was 30ml / min and the flow rate of argon gas was 30ml / min from the air inlet of the vacuum deposition chamber. 60ml / min, the working pressure in the vacuum chamber is 35Pa, the target voltage is -950V, and the workpiece voltage is -500V. First pass argon gas, adjust the working pressure to a stable state, and turn on the power switch. After heating and cleaning the surface of the workpiece for 1 hour, when the deposition temperature is 1100 ° C, the trichloromethylsilane gas is introduced, and after 3 hours of deposition, a metal-ceramic composite coating with a thickness of about 30 μm can be obtained. The metal-ceramic composite coating is detected by X-ray diffraction, and the composite film is mainly composed of zirconium, hafnium and molybdenum silicide, and a small amount of mo...

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PUM

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Abstract

The invention relates to high temperature resistant antioxidative coating materials, and particularly provides a high temperature resistant antioxidative metal ceramic composite coating and a preparation method thereof. The composite thin film is characterized in that the coating consists of refractory metal, refractory carbide and an intermetallic compound. The coating is 10-50 mu m thick. The refractory metal is one or more of molybdenum, tantalum, zirconium and hafnium, the refractory carbide consists of silicon carbide as well as one or more of tantalum carbide, zirconium carbide and hafnium carbide, and the intermetallic compound consists of one or more of molybdenum silicide, tantalum silicide, zirconium silicide, hafnium silicide, tantalum silicon carbide, zirconium silicon carbide and hafnium silicon carbide. The crystal structure of the coating consists of amorphous and/or polycrystal nanoparticles.

Description

technical field [0001] The invention relates to a high-temperature-resistant and anti-oxidative coating material, and particularly provides a high-temperature-resistant and anti-oxidative metal-ceramic composite coating and a preparation method thereof. Background technique [0002] Refractory metals such as molybdenum, niobium, tungsten and rhenium, their alloys and carbon materials can be used as materials for high temperature resistant components such as rocket engine nozzles, missile cruiser turbines and spacecraft due to their high melting point, high temperature resistance and strong corrosion resistance. However, these refractory materials cannot withstand high temperature oxidation at 1800-2000°C, making it difficult to exert their characteristics. Refractory metals need to maintain high strength above 1800 °C, and dense high-temperature oxidation-resistant coatings must be prepared. Liquid rocket engines used for orbital introduction and attitude control of spacecr...

Claims

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Application Information

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IPC IPC(8): C23C30/00C23C14/14
Inventor 陈照峰吴王平
Owner SUZHOU HONGJIU AVIATION THERMAL MATERIALS TECH CO LTD
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