High temperature resistant antioxidative metal ceramic composite coating and preparation method thereof
A metal-ceramic composite and anti-oxidation technology, applied in metal material coating process, coating and other directions, can solve the problems of easy cracking and short thermal shock resistance life of ceramic coatings, and achieve good high temperature oxidation resistance and fast deposition rate. Effect
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Embodiment 1
[0022] Using graphite as the workpiece and high-purity molybdenum plate as the target, the vacuum deposition chamber is fed with trichloromethylsilane and argon from the air inlet, the flow rate of methane is 20ml / min, the flow rate of argon is 50ml / min, and the vacuum The indoor working pressure is 30Pa, the target voltage is -900V, and the workpiece voltage is -400V. First pass argon gas, adjust the working pressure to a stable state, and turn on the power switch. After heating and cleaning the surface of the workpiece for 30min-50min, when the deposition temperature is 1000 ℃, the trichloromethylsilane gas is introduced, and after 2h of deposition, a metal-ceramic composite coating with a thickness of about 18 μm can be obtained. The metal-ceramic composite coating is detected by X-ray diffraction, and the composite film is mainly composed of molybdenum and molybdenum silicide, with a small amount of molybdenum silicide phase. The coating consists of a dense polycrystallin...
Embodiment 2
[0024] The carbon / carbon composite material was used as the workpiece, the zirconium-10at.% hafnium alloy disk was used as the target material, and the flow rate of chloromethylsilane and argon gas was 30ml / min and the flow rate of argon gas was 30ml / min from the air inlet of the vacuum deposition chamber. 60ml / min, the working pressure in the vacuum chamber is 35Pa, the target voltage is -950V, and the workpiece voltage is -500V. First pass argon gas, adjust the working pressure to a stable state, and turn on the power switch. After heating and cleaning the surface of the workpiece for 1 hour, when the deposition temperature is 1100 ° C, the trichloromethylsilane gas is introduced, and after 3 hours of deposition, a metal-ceramic composite coating with a thickness of about 30 μm can be obtained. The metal-ceramic composite coating is detected by X-ray diffraction, and the composite film is mainly composed of zirconium, hafnium and molybdenum silicide, and a small amount of mo...
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