Grinding material for improving surface cleanliness of thinned gallium arsenide substrate, and processing method
A gallium arsenide and rear surface technology, applied in chemical instruments and methods, other chemical processes, etc., can solve the problems of reducing product cost, shedding, fragmentation, etc., achieve the effect of improving quality and yield, and preventing particle adsorption or residue
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[0034] Example 1:
[0035] In step c), the stirring time is 40-60 min, and the heat preservation is 20-30 min.
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[0036] Example 2:
[0037] In step d), the particle diameter of the alumina powder is 3-15 μm.
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[0038] Example 3:
[0039] In step e), the particle diameter of the emery powder is 5-20 μm.
[0040] The invention also relates to a processing method for thinning a gallium arsenide substrate using the abrasive in claim 1, which includes the following steps:
[0041] a) Place the gallium arsenide substrate that needs to be thinned into the grinder. In the grinder, a flow rate of 3-20ml / min is sprayed onto the surface of the grinding disc consisting of pure water, conditioner, alumina powder and emery powder Abrasive, the grinding pressure of the grinder is 1-10Kg, and the rotation speed of the grinding wheel and the grinding disc is 15-25 rpm;
[0042] b) After the thinning is completed, rinse the gallium arsenide substrate with pure water and blow dry;
[0043] c) Place the gallium arsenide substrate in an ethanol solution for 3-10 minutes;
[0044] d) Use a white film to adhere to the surface of the gallium arsenide substrate, and examine the number of particles on the surface of th...
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