Method and apparatus for coating diamond-like carbon onto particles

A diamond and particle technology, which is applied in the field of coating diamond-like carbon on particles and equipment, can solve problems such as inability to promote ion bombardment

Inactive Publication Date: 2001-01-10
3M CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

None of the existing particle coating techniques facilitate ion bombardment during coating deposition

Method used

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  • Method and apparatus for coating diamond-like carbon onto particles
  • Method and apparatus for coating diamond-like carbon onto particles
  • Method and apparatus for coating diamond-like carbon onto particles

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0084] This example illustrates the deposition of DLN on oxide-coated phosphor particles, where the particles are placed on a vibrating plate in a capacitively coupled plasma reactor.

[0085] A commercially available parallel-plate capacitively coupled plasma reactor (model 2480 from PlasmaTherm, St. Petersburg, Fl) was modified for DLN deposition. The reactor has a grounded reaction chamber electrode containing a powered electrode approximately as figure 1 As shown, the difference is that the power-connected electrode includes both the aluminum disc 4 that puts the particles and the aluminum plate that is connected to the power supply under the disc. The aluminum disk is used as part of the electrode because it is conductive. 50 g of oxide-coated phosphor particles (available from Durel Corporation, Chandler, AZ, model 729 with 3000 Å thick SiO 2 :TiO 2 coating, particle size 25-30 μm). The pressure in the reactor was pumped down to below 0.65 Pa, and the temperature was...

Embodiment 2

[0088] This example illustrates the preparation of dense networks containing carbon and fluorine. The reactor system used was a capacitively coupled asymmetric parallel-plate plasma reactor roughly as figure 2 shown. The particles are placed on the quartz material directly above the charged planar electrodes. The reactor was used as the ground electrode. A spouted bed was used to agitate the particles.

[0089] The reactor has an aluminum tube of 15.2 cm inner diameter x 15.2 cm height, closed at one end by an aluminum plate with a pump connection. The bottom of the aluminum tube incorporates the electrodes, glass frit and plastic insulating plate. The powered electrodes communicate with the RF power supply through the matching network. Phosphor particles (400 g, type 729 from Durel Corporation, with 300 nm thick SiO 2 :TiO 2 coating, particle size 25-30 μm) was placed on the frit. Pump the system pressure to below 0.0013kPa. Introduce perfluorobutane (C 4 f 10 ), ...

Embodiment 3

[0091] This example illustrates the preparation of a dense network of carbon, hydrogen, and silicon on abrasive grains in which the grains were previously cleaned with an argon plasma. The reactor system used was a parallel plate plasma reactor roughly as figure 2 shown. The particles are placed on a frit directly above a charged planar electrode in a parallel plate plasma reactor. The reactor was used as the ground electrode. A spouted bed was used to agitate the particles.

[0092] The reactor has an aluminum tube of 15.2 cm inner diameter x 15.2 cm height, closed at one end by an aluminum plate with a pump connection. The bottom of the aluminum tube incorporates the electrodes, glass frit and plastic insulating plate. The powered electrodes communicate with the RF power supply through the matching network.

[0093] 400 g of silicon carbide particles (size 80, US Tyler Mesh) were placed on the frit. Pump the system pressure to below 0.0013kPa. Before the deposition o...

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Abstract

A method for making particles coated with a diamond-like network, which can include additive components. The method comprises subjecting a multiplicity of particles to a carbon-based plasma in an evacuated radio frequency powered capacitively coupled reactor system in which ion sheaths are formed around the electrodes and wherein the particles are agitated in such a manner as to expose their surfaces to the reactive species in the plasma while keeping the particles substantially within an ion sheath.The advantages of the present invention include (i) the efficient deposition of DLN onto particles at high deposition rates, (ii) the deposition of densely-packed DLN coatings, (iii) the ability to perform in situ surface cleaning of particles by ion bombardment with oxygen- and argon-containing plasmas prior to deposition of DLN, and (iv) the ability to tailor the bulk and surface properties of the coatings by manipulating the composition of the coating and the intensity of ion bombardment during the coating process.

Description

technical field [0001] The present invention relates to a method and equipment for depositing a diamond-like network on particles, the diamond-like network contains carbon, and may also contain at least one of hydrogen, nitrogen, oxygen, fluorine, silicon, sulfur, titanium or copper. Background technique [0002] Carbon coatings or films are known to be hard, chemically inert, resistant to corrosion, moisture and oxygen. The benefit of this type of coating lies in its mechanical and chemical protective properties. Carbon films or coatings can be deposited on planar substrates in the form of graphite, diamond crystals, and amorphous diamond-like networks (DLN). These films have different physical and chemical properties. [0003] DLN coating can be added on a variety of planar substrates, such as organic materials, polymer films, ceramic substrates (such as alumina, barium titanate and boron nitride), semiconductor substrates (such as silicon, germanium, gallium arsenide, t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J2/00B22F1/16C23C16/26C23C16/27C23C16/44C23C16/442C23C16/505C23C16/509
CPCB01J2/006C23C16/442C23C16/4417B22F1/02C23C16/5096Y10S427/106C23C16/26B22F1/16
Inventor M·M·戴维
Owner 3M CO
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