Perovskite solar cell with high performance transparent conductive electrode and electron transfer layer and preparation method thereof
A technology of transparent conductive electrodes and electron transport layers, which is applied in the field of preparation of perovskite solar cells, can solve the problem of not effectively reducing the defect state density and surface charge trap density, reducing the short-circuit current density of perovskite solar cells, and affecting the battery life. Photoelectric conversion efficiency and other issues to achieve the effect of avoiding rapid recombination, reducing the density of interface defect levels, and shortening the production cycle
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[0029] A method for preparing a perovskite solar cell with a high-performance transparent conductive electrode and an electron transport layer, comprising the following steps:
[0030] Step 1: Deposit a transparent conductive oxide electrode 2 on the glass substrate 1 by radio frequency magnetron co-sputtering method through double targets. The transparent conductive oxide electrode 2 is made of fluorine-doped tin oxide FTO, indium tin oxide ITO, aluminum-doped zinc oxide Any material in AZO and gallium-doped zinc oxide GZO, the transparent conductive oxide electrode 2 has a lower resistivity, higher electrical conductivity, high transmittance, dense film, and the deposition temperature of the transparent conductive oxide electrode 2 is controlled at 23-150°C, the thickness is controlled at 50-150nm;
[0031] Step 2: After the transparent conductive oxide electrode 2 is prepared, the metal oxide electron transport layer 3 is deposited through one of the target sources by radio...
Embodiment 1
[0035] A method for preparing a perovskite solar cell with a high-performance transparent conductive electrode and an electron transport layer, comprising the steps of:
[0036] 1) Cleaning of the glass substrate 1: cleaning the substrate in an ultrasonic cleaner is divided into the following four steps, ① cleaning with ethanol for 15 minutes; ② cleaning with acetone for 30 minutes; ③ cleaning with isopropanol for 30 minutes; ④ cleaning with ethanol for 15 minutes; The glass substrate with electrodes was blown dry with nitrogen.
[0037] 2) Preparation of transparent conductive oxide electrode 2: based on figure 1 Structure The transparent conductive oxide electrode 2 is prepared on the glass substrate 1 by the radio frequency magnetron co-sputtering method, taking fluorine-doped tin oxide FTO as an example, the target material is tin oxide, and the deposition gas atmosphere is argon, oxygen and trifluorine Nitrogen, the ratio of which is 26:1:3 sccm, the deposition temperatu...
Embodiment 2
[0043] A method for preparing a perovskite solar cell with a high-performance transparent conductive electrode and an electron transport layer, comprising the steps of:
[0044] 1) Cleaning of the glass substrate 1: cleaning the substrate in an ultrasonic cleaner is divided into the following four steps, ① cleaning with ethanol for 15 minutes; ② cleaning with acetone for 30 minutes; ③ cleaning with isopropanol for 30 minutes; ④ cleaning with ethanol for 15 minutes; The glass substrate with electrodes was blown dry with nitrogen.
[0045] 2) Preparation of transparent conductive oxide electrode 2: based on figure 1 Structure The transparent conductive oxide electrode 2 is prepared on the glass substrate 1 by the radio frequency magnetron co-sputtering method. Taking aluminum-doped zinc oxide AZO as an example, the target materials are zinc oxide and aluminum, and the deposition gas atmosphere is argon and oxygen. The ratio is 29.4:0.6 sccm, the deposition temperature is 100° C...
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