Diamond-like carbon coating preparation device with resultant field and application of device

A technology of diamond coating and preparation equipment, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems of small effective deposition area, affecting the quality of film formation, and low ionization rate of equipment, and achieves Improve the deposition rate, improve the surface activity, and improve the effect of ionization

Active Publication Date: 2018-08-07
WENZHOU POLYTECHNIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing DLC ​​deposition technologies are mainly physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD mainly includes ion beam deposition (IBD), magnetron sputtering, multi-arc ion plating, pulsed laser deposition, etc. CVD includes thermal Silk chemical vapor deposition and plasma chemically enhanced vapor deposition (PECVD) have some problems: ion beam deposition has low sputtering rate and low deposition rate due to graphite sputtering; magnetron sputtering deposition has low sputtering rate on the one hand and low On the one hand, low atomic energy leads to loose structure and low hardness; a large number of carbon particles will be produced during multi-arc ion plating deposition; pulsed laser deposition has high energy consumption, poor coating uniformity, and small effective deposition area; hot wire vapor deposition technology has high deposition temperature, The range of matrix materials is greatly limited; although PECVD effectively reduces the reaction temperature, the deposition efficiency is low during the deposition process, the ionization rate of carbon atoms is low, and the film quality structure is not dense enough
[0005] Existing diamond-like coating equipment is mainly physical vapor deposition (PVD) devices and chemical vapor deposition (CVD) devices, among which CVD devices req

Method used

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  • Diamond-like carbon coating preparation device with resultant field and application of device
  • Diamond-like carbon coating preparation device with resultant field and application of device
  • Diamond-like carbon coating preparation device with resultant field and application of device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] see Figure 4 As shown: the configuration of the composite magnetic field coating equipment for preparing hydrogen-containing diamond-like coatings is as follows, the process components 13 used are four sets of anode layer ion sources 131 and four sets of magnetron sputtering metal cathodes 132, and the two particle sources are arranged at intervals , eight groups of process components form a closed ring magnetic field, the center water-cooled anode 12 is equipped with a rotatable magnetic shoe, eight groups of magnets are assembled on the magnetic shoe, and the longitudinal electromagnetic coils 15 are respectively assembled at the upper and lower center positions. During the glow discharge process, Under the action of the magnetic field, the electrons under the compound magnetic field will be influenced by the electric field and attracted to the water-cooled anode. During the movement of the electrons, there will be collisions of hydrocarbon gas, thereby ionizing the g...

Embodiment 2

[0058] see Figure 5 As shown: the configuration of the composite magnetic field coating equipment for preparing doped diamond-like coatings is as follows, the process components 13 used are four sets of anode plates 133 with magnetic fields and four sets of arc sources 134 equipped with suspended gauze baffles. Arranged at intervals, during the arc source discharge process, the gauze baffle with suspended potential can filter out large particles. When the anode plate and the central anode with a magnetic field are connected, the electrons in the arc source discharge process will be controlled by the electric field. Attracted to the anode, during the movement of electrons, there will be hydrocarbon gas collisions, thereby ionizing the gas, and efficiently producing diamond-like coatings; in addition, the metal atoms filtered by the gauze can pass through the arc during the diamond-like deposition process. The adjustment of the current changes the ratio of the doped metal to fo...

Embodiment 3

[0074] see Image 6 As shown: the configuration of the composite magnetic field coating equipment for preparing hydrogen-free diamond-like coatings is as follows. The process components 13 used are four sets of graphite magnetron sputtering targets 135 and four sets of magnetron sputtering metal cathodes 136. The distance between the two particle sources is Arrangement, eight groups of process components form a closed circular magnetic field, the center water-cooled anode 12 is equipped with a rotatable magnetic shoe, eight groups of magnets are assembled on the magnetic shoe, and the longitudinal electromagnetic coils 15 are respectively assembled at the upper and lower center positions, during the glow discharge process In the process, the electrons under the compound magnetic field will be influenced by the electric field under the action of the magnetic field, and will be attracted to the water-cooled anode. During the movement of the electrons, there will be carbon particl...

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Abstract

The invention discloses a diamond-like carbon coating preparation device with a resultant field and application of the device. A diamond-like carbon coating mainly utilizes a central positive pole, onwhich a rotational magnetic core is assembled, or a vertical electromagnetic coil as well as a closed magnetic field formed by eight groups of process components assembled on a regular octagonal machine, plasmas below the formed composite magnetic field are used for preparing the diamond-like carbon coating, a closed toroidal magnetic field is formed by the eight groups of process components controlled by the magnetic field, eight magnetic boots are assembled on the rotational magnetic core of the central positive pole and can form a transverse magnetic field with corresponding process components, the vertical coil can form a vertical magnetic field in a vacuum chamber after being energized, a complicated resultant field can be formed in the vacuum chamber through interaction of two or three magnetic fields, the electronic free path can be increased, the ionization rate of particles is enhanced, so that the activity of carbon particles is increased, and the high-quality diamond-like carbon coating is obtained.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and specifically refers to a diamond-like coating preparation device prepared by a composite magnetic field and its application. Background technique [0002] Diamond-like carbon film (Diamond-like carbon film) has many excellent physical and chemical properties, such as high hardness, low friction coefficient, excellent wear resistance, high dielectric constant, high breakdown voltage, wide band gap, chemical inertness and biocompatibility etc. After years of development, the application of DLC films in many fields has also entered the stage of practical and industrial production. However, in terms of the performance of diamond-like carbon-based films: high internal stress and weak film-base bonding; low toughness, strong brittleness and poor thermal stability; tribological behavior is greatly affected by the environment, these three major problems still restrict its reliability. A crit...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C16/26C23C16/02C23C16/513
CPCC23C14/0036C23C14/3407C23C14/35C23C16/029C23C16/26C23C16/513
Inventor 郎文昌李洁高斌
Owner WENZHOU POLYTECHNIC
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